Presentation 2014-10-30
Fabrication of membrane lasers by epitaxial growth of InP using InP-based active layer film on SiO_2/Si substrate
Takuro Fujii, Tomonari Sato, Koji Takeda, Koichi Hasebe, Takaaki Kakitsuka, Shinji Matsuo,
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Abstract(in English) Integration of III-V lasers on a Si substrate is the key to realizing large-scale photonic integrated circuits (PICs) using silicon (Si) device fabrication technologies. We have therefore developed membrane buried heterostructure lasers on SiO_2/Si by epitaxial growth on an InP-based membrane including multiple quantum well, which is directly bonded to a SiO_2/Si substrate. There was no degradation of the crystal quality even after the high-temperature annealing. We have successfully fabricated the compact DFB laser with a 120-μm-long cavity on SiO_2, and also experimentally confirmed that the room temperature continuous wave emission at a threshold current of 1.8 mA and the direct modulation of 40-Gbit/s NRZ were achieved.
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Keyword(in English) Epitaxial growth / DFB laser / Direct bonding / Si photonics
Paper # OCS2014-68,OPE2014-112,LQE2014-86
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Committee OCS
Conference Date 2014/10/23(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication of membrane lasers by epitaxial growth of InP using InP-based active layer film on SiO_2/Si substrate
Sub Title (in English)
Keyword(1) Epitaxial growth
Keyword(2) DFB laser
Keyword(3) Direct bonding
Keyword(4) Si photonics
1st Author's Name Takuro Fujii
1st Author's Affiliation Nanophotonics Center, NTT Corporation:NTT Device Technology Laboratories, NTT Corporation()
2nd Author's Name Tomonari Sato
2nd Author's Affiliation Nanophotonics Center, NTT Corporation
3rd Author's Name Koji Takeda
3rd Author's Affiliation Nanophotonics Center, NTT Corporation:NTT Device Technology Laboratories, NTT Corporation
4th Author's Name Koichi Hasebe
4th Author's Affiliation Nanophotonics Center, NTT Corporation:NTT Device Technology Laboratories, NTT Corporation
5th Author's Name Takaaki Kakitsuka
5th Author's Affiliation Nanophotonics Center, NTT Corporation:NTT Device Technology Laboratories, NTT Corporation
6th Author's Name Shinji Matsuo
6th Author's Affiliation Nanophotonics Center, NTT Corporation:NTT Device Technology Laboratories, NTT Corporation
Date 2014-10-30
Paper # OCS2014-68,OPE2014-112,LQE2014-86
Volume (vol) vol.114
Number (no) 281
Page pp.pp.-
#Pages 6
Date of Issue