Presentation | 2014-10-16 Developing of TES X-ray Microcalorimeter Array for a STEM-EDS System Haruka MURAMATSU, Kenichiro NAGAYOSHI, Tasuku HAYASHI, Kazuhiro SAKAI, Kazuhisa MITSUDA, Noriko Y. YAMASAKI, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Energy dispersive X-ray spectroscopy (EDS) performed with a scanning transmission electron micro-scope (STEM) is now playing an important role for compositional analysis in various research fields such as nan-otechnology, material science and biotechnology. However, due to a low energy resolution of ~130 eV with a Si(Li) solid-state detector (SSD), generally used in a STEM-EDS, many spectral peaks are hard to separate. We are then developing a new STEM-EDS system with a superconducting transition-edge sensor (TES) microcalorimeter array to achieve a good energy resolution (< 10 eV) in wide-energy band (0.5 - 10 keV). We describe the design of 64-channel TES array prototype optimized for STEM-EDS and the result of the first X-ray irradiation test. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | STEM / Transition-edge-sensor microcalorimeters / X-ray |
Paper # | SCE2014-45 |
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Conference Information | |
Committee | SCE |
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Conference Date | 2014/10/8(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Superconductive Electronics (SCE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Developing of TES X-ray Microcalorimeter Array for a STEM-EDS System |
Sub Title (in English) | |
Keyword(1) | STEM |
Keyword(2) | Transition-edge-sensor microcalorimeters |
Keyword(3) | X-ray |
1st Author's Name | Haruka MURAMATSU |
1st Author's Affiliation | Japan Aerospace Exploration Agency() |
2nd Author's Name | Kenichiro NAGAYOSHI |
2nd Author's Affiliation | Japan Aerospace Exploration Agency |
3rd Author's Name | Tasuku HAYASHI |
3rd Author's Affiliation | Japan Aerospace Exploration Agency |
4th Author's Name | Kazuhiro SAKAI |
4th Author's Affiliation | Japan Aerospace Exploration Agency |
5th Author's Name | Kazuhisa MITSUDA |
5th Author's Affiliation | Japan Aerospace Exploration Agency |
6th Author's Name | Noriko Y. YAMASAKI |
6th Author's Affiliation | Japan Aerospace Exploration Agency |
Date | 2014-10-16 |
Paper # | SCE2014-45 |
Volume (vol) | vol.114 |
Number (no) | 247 |
Page | pp.pp.- |
#Pages | 5 |
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