Presentation 2014-10-16
Developing of TES X-ray Microcalorimeter Array for a STEM-EDS System
Haruka MURAMATSU, Kenichiro NAGAYOSHI, Tasuku HAYASHI, Kazuhiro SAKAI, Kazuhisa MITSUDA, Noriko Y. YAMASAKI,
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Abstract(in English) Energy dispersive X-ray spectroscopy (EDS) performed with a scanning transmission electron micro-scope (STEM) is now playing an important role for compositional analysis in various research fields such as nan-otechnology, material science and biotechnology. However, due to a low energy resolution of ~130 eV with a Si(Li) solid-state detector (SSD), generally used in a STEM-EDS, many spectral peaks are hard to separate. We are then developing a new STEM-EDS system with a superconducting transition-edge sensor (TES) microcalorimeter array to achieve a good energy resolution (< 10 eV) in wide-energy band (0.5 - 10 keV). We describe the design of 64-channel TES array prototype optimized for STEM-EDS and the result of the first X-ray irradiation test.
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Keyword(in English) STEM / Transition-edge-sensor microcalorimeters / X-ray
Paper # SCE2014-45
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Conference Information
Committee SCE
Conference Date 2014/10/8(1days)
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Paper Information
Registration To Superconductive Electronics (SCE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Developing of TES X-ray Microcalorimeter Array for a STEM-EDS System
Sub Title (in English)
Keyword(1) STEM
Keyword(2) Transition-edge-sensor microcalorimeters
Keyword(3) X-ray
1st Author's Name Haruka MURAMATSU
1st Author's Affiliation Japan Aerospace Exploration Agency()
2nd Author's Name Kenichiro NAGAYOSHI
2nd Author's Affiliation Japan Aerospace Exploration Agency
3rd Author's Name Tasuku HAYASHI
3rd Author's Affiliation Japan Aerospace Exploration Agency
4th Author's Name Kazuhiro SAKAI
4th Author's Affiliation Japan Aerospace Exploration Agency
5th Author's Name Kazuhisa MITSUDA
5th Author's Affiliation Japan Aerospace Exploration Agency
6th Author's Name Noriko Y. YAMASAKI
6th Author's Affiliation Japan Aerospace Exploration Agency
Date 2014-10-16
Paper # SCE2014-45
Volume (vol) vol.114
Number (no) 247
Page pp.pp.-
#Pages 5
Date of Issue