| Presentation | 2014-10-15 Fabrication of MgB_2 nanowire superconducting single-photon detector using Br_2-N_2 dry etching Hiroyuki SHIBATA, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | For the development of superconducting devices using MgB_2, it is necessary to develop the new nano fabrication process for the material. Here, we report the fabrication of meander pattern of MgB_2 with the line width of 76 nm by using Br_2-N_2 dry etching. The detector exhibits the capacity for detecting single photons at λ = 405 nm even at 10 K. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MgB_2 / Br_2 / dry-etching / superconducting single-photon detector |
| Paper # | SCE2014-36 |
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| Conference Information | |
| Committee | SCE |
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| Conference Date | 2014/10/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Superconductive Electronics (SCE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of MgB_2 nanowire superconducting single-photon detector using Br_2-N_2 dry etching |
| Sub Title (in English) | |
| Keyword(1) | MgB_2 |
| Keyword(2) | Br_2 |
| Keyword(3) | dry-etching |
| Keyword(4) | superconducting single-photon detector |
| 1st Author's Name | Hiroyuki SHIBATA |
| 1st Author's Affiliation | NTT Basic Research Laboratories, NTT Corporation() |
| Date | 2014-10-15 |
| Paper # | SCE2014-36 |
| Volume (vol) | vol.114 |
| Number (no) | 247 |
| Page | pp.pp.- |
| #Pages | 5 |
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