| Presentation | 2014-10-15 Fabrication of three-dimensional superconducting tunnel junctions Go FUJII, Masahiro UKIBE, Shigetomo SHIKI, Masataka OHKUBO, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In order to achieve a high throughput analysis of X-ray absorption fine structure (XAFS) with superconducting tunnel junction (STJ) array detectors, the pixel number of the array detectors should be further increased up to more than 1000 to enlarge the sensitive area. In this work, we have fabricated the STJ with three-dimensional structure by embedding a wiring layer in a SiO_2 isolation layer underneath a base electrode of STJs. The fabricated STJ showed excellent current-voltage characteristics having low subgap currents less than 2 nA. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Superconducting tunnel junction / Soft X-ray detector / Three-dimensional structure / X-ray absorption fine structure / Nb/Al |
| Paper # | SCE2014-35 |
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| Conference Information | |
| Committee | SCE |
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| Conference Date | 2014/10/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Superconductive Electronics (SCE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of three-dimensional superconducting tunnel junctions |
| Sub Title (in English) | |
| Keyword(1) | Superconducting tunnel junction |
| Keyword(2) | Soft X-ray detector |
| Keyword(3) | Three-dimensional structure |
| Keyword(4) | X-ray absorption fine structure |
| Keyword(5) | Nb/Al |
| 1st Author's Name | Go FUJII |
| 1st Author's Affiliation | Research Instrumentation Frontier, National Institute of Advanced Industrial Science and Technoloby() |
| 2nd Author's Name | Masahiro UKIBE |
| 2nd Author's Affiliation | Research Instrumentation Frontier, National Institute of Advanced Industrial Science and Technoloby |
| 3rd Author's Name | Shigetomo SHIKI |
| 3rd Author's Affiliation | Research Instrumentation Frontier, National Institute of Advanced Industrial Science and Technoloby |
| 4th Author's Name | Masataka OHKUBO |
| 4th Author's Affiliation | Research Instrumentation Frontier, National Institute of Advanced Industrial Science and Technoloby |
| Date | 2014-10-15 |
| Paper # | SCE2014-35 |
| Volume (vol) | vol.114 |
| Number (no) | 247 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |