| Presentation | 2014-10-15 Evaluation of tunnel barrier defects in Nb/AlOx/Nb Josephson junctions using large area junctions Mutsuo HIDAKA, Shuichi NAGASAWA, Tetsuro SATOH, Kenji HINODE, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Defects in almost all Nb/AlOx/Nb Josephson junctions (JJ) which are used in superconducting integrated circuits are leak JJs with extraordinarily large critical current. We focused on the origin of the leak JJs as small particles underneath the JJs and experimentally proved it using large area JJs of 20 μm square which can detect the leak JJs quite efficiently. The cause of defects has been overlooked to date, because size and density of the particles are too small to detect by microscope observations and evaluations by our process diagnostics structures. In order to implement larger scale superconducting integrated circuits with several tens thousands or several million JJs which are 10 and 100 times larger than current circuits, it is important to develop fabrication process on target to reduce the particles. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Josephson junction / Nb/AlOx/Nb junction / SFQ circuit / Particle / Defect |
| Paper # | SCE2014-34 |
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| Conference Information | |
| Committee | SCE |
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| Conference Date | 2014/10/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Superconductive Electronics (SCE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Evaluation of tunnel barrier defects in Nb/AlOx/Nb Josephson junctions using large area junctions |
| Sub Title (in English) | |
| Keyword(1) | Josephson junction |
| Keyword(2) | Nb/AlOx/Nb junction |
| Keyword(3) | SFQ circuit |
| Keyword(4) | Particle |
| Keyword(5) | Defect |
| 1st Author's Name | Mutsuo HIDAKA |
| 1st Author's Affiliation | National Institute of Advanced Industrial Science and Technology() |
| 2nd Author's Name | Shuichi NAGASAWA |
| 2nd Author's Affiliation | National Institute of Advanced Industrial Science and Technology |
| 3rd Author's Name | Tetsuro SATOH |
| 3rd Author's Affiliation | National Institute of Advanced Industrial Science and Technology |
| 4th Author's Name | Kenji HINODE |
| 4th Author's Affiliation | National Institute of Advanced Industrial Science and Technology |
| Date | 2014-10-15 |
| Paper # | SCE2014-34 |
| Volume (vol) | vol.114 |
| Number (no) | 247 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |