| Presentation | 2014-10-24 A Study on millimeter wave measurements for complex permittivity of dielectric films using a cavity resonator method Shunsuke KOJIMA, Hiroki TSUCHIYA, Takashi SHIMIZU, Yoshinori KOGAMI, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In order to develop thin dielectric materials, accurate measurement methods for complex permittivity are required. We focus on two types of cavity resonator method for film material measurements. One is a circular empty cavity resonator, which is attached short conductor plate to circular cylinder for the cut-off circular waveguide method. Another is an empty cavity resonator, which is designed for a thin material measurement. Complex permittivity measurements for 5 kinds of dielectric film are performed to discuss a measurement limit for sample thickness and its accuracy. As a result, it is verified that it can be measured till thickness of 10μm when the cavity resonator designed for film materials is used. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Cavity resonator method / Dielectric film / Complex permittivity / Millimeter-wave |
| Paper # | EMCJ2014-56,MW2014-112,EST2014-70 |
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| Conference Information | |
| Committee | EST |
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| Conference Date | 2014/10/16(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electronic Simulation Technology (EST) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A Study on millimeter wave measurements for complex permittivity of dielectric films using a cavity resonator method |
| Sub Title (in English) | |
| Keyword(1) | Cavity resonator method |
| Keyword(2) | Dielectric film |
| Keyword(3) | Complex permittivity |
| Keyword(4) | Millimeter-wave |
| 1st Author's Name | Shunsuke KOJIMA |
| 1st Author's Affiliation | Graduate School of Engineering, Utsunomiya University() |
| 2nd Author's Name | Hiroki TSUCHIYA |
| 2nd Author's Affiliation | Graduate School of Engineering, Utsunomiya University |
| 3rd Author's Name | Takashi SHIMIZU |
| 3rd Author's Affiliation | Graduate School of Engineering, Utsunomiya University |
| 4th Author's Name | Yoshinori KOGAMI |
| 4th Author's Affiliation | Graduate School of Engineering, Utsunomiya University |
| Date | 2014-10-24 |
| Paper # | EMCJ2014-56,MW2014-112,EST2014-70 |
| Volume (vol) | vol.114 |
| Number (no) | 268 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |