| Presentation | 2014-10-24 The Development of Hot-Wall Chemical Vapor Deposition Equipment with Structural System for Laser Irradiation, and Preparation of Carbon Nanotubes Daiki Kawaguchi, Yusaku Tsuda, Nagata Tomoko /, Nobuyuki Iwata, Hiroshi Yamamoto, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We report the development of Hot-wall type chemical vapor Deposition (HW-CVD) equipment by which high temperature, 850℃～1000℃, growth of single-walled carbon nanotube (SWNT) is able to be carried out with free electron laser (PEL) irradiation. Heater is separated to two zones. One of them is for decomposition of carbon source, and the other one is for growth of SWNT. A vaporizer is used to stabilize the quantity of ethanol introduction as a carbon source. Using this system, we try to SWNT growth on SiO_2/Si substrate with the same condition as that of the cold-wall type (CW-) CVD equipment. However, fibrous materials are not confirmed from the substrate surface image after CVD. G-Band, D-Band, and RBM are not confirmed from the Raman spectrum. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Hot-Wall Type Chemical Vapor Deposition Equipment / Single Wall Nanotube |
| Paper # | CPM2014-106 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2014/10/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | The Development of Hot-Wall Chemical Vapor Deposition Equipment with Structural System for Laser Irradiation, and Preparation of Carbon Nanotubes |
| Sub Title (in English) | |
| Keyword(1) | Hot-Wall Type Chemical Vapor Deposition Equipment |
| Keyword(2) | Single Wall Nanotube |
| 1st Author's Name | Daiki Kawaguchi |
| 1st Author's Affiliation | College of Science and Technology, Nihon University() |
| 2nd Author's Name | Yusaku Tsuda |
| 2nd Author's Affiliation | College of Science and Technology, Nihon University |
| 3rd Author's Name | Nagata Tomoko / |
| 3rd Author's Affiliation | College of Science and Technology, Nihon University |
| 4th Author's Name | Nobuyuki Iwata |
| 4th Author's Affiliation | College of Science and Technology, Nihon University |
| 5th Author's Name | Hiroshi Yamamoto |
| 5th Author's Affiliation | College of Science and Technology, Nihon University |
| Date | 2014-10-24 |
| Paper # | CPM2014-106 |
| Volume (vol) | vol.114 |
| Number (no) | 276 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |