| Presentation | 2014-07-17 Sensitivity Enhancement of SOI Photodiode by Metal Diffraction Grating Hiroaki SATOH, Shohei IWATA, Atsushi ONO, Hiroshi INOKAWA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The integrated circuits based on SOI (silicon-on-insulator) technology have the advantages of operation speed, power consumption, circuit density, etc., compared with those of bulk silicon. However, the sensitivity of SOI photodetectors is usually not high due to the small thickness. To enhance the sensitivity, a new type of SOI photodiode with line-and-space metal grating has been proposed. In this report, it is shown that the approximately one-order magnitude enhancement for specific wavelength and polarization can be achieved by applying the line-and-space metal grating to thin SOI photodiode. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SOI photodiode / metal diffraction grating / wavelength selectivity / polarization dependence |
| Paper # | MW2014-61,OPE2014-30,EST2014-22,MWP2014-19 |
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| Conference Information | |
| Committee | OPE |
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| Conference Date | 2014/7/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Optoelectronics (OPE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Sensitivity Enhancement of SOI Photodiode by Metal Diffraction Grating |
| Sub Title (in English) | |
| Keyword(1) | SOI photodiode |
| Keyword(2) | metal diffraction grating |
| Keyword(3) | wavelength selectivity |
| Keyword(4) | polarization dependence |
| 1st Author's Name | Hiroaki SATOH |
| 1st Author's Affiliation | Research Institute of Electronics, Shizuoka University:Graduate School of Engineering, Shizuoka University() |
| 2nd Author's Name | Shohei IWATA |
| 2nd Author's Affiliation | Graduate School of Engineering, Shizuoka University |
| 3rd Author's Name | Atsushi ONO |
| 3rd Author's Affiliation | Research Institute of Electronics, Shizuoka University:Graduate School of Engineering, Shizuoka University |
| 4th Author's Name | Hiroshi INOKAWA |
| 4th Author's Affiliation | Research Institute of Electronics, Shizuoka University:Graduate School of Engineering, Shizuoka University |
| Date | 2014-07-17 |
| Paper # | MW2014-61,OPE2014-30,EST2014-22,MWP2014-19 |
| Volume (vol) | vol.114 |
| Number (no) | 142 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |