| Presentation | 2014-08-21 Quick control of the vibration amplitude in high-Q MEMS resonators Hajime OKAMOTO, Imran MAHBOOB, Koji ONOMITSU, Hiroshi YAMAGUCHI, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | High-Q MEMS resonators have a strong advantage in their applications, e.g., highly precise sensors and low power consumption logics. However, the high-Q characteristic limits the switching speed of the mechanical resonator because of the long ring-down time owing to the small energy dissipation. Here we propose a new scheme to solve this trade-off using parametric coupling between two MEMS resonators. The realization of strong parametric coupling enables quick energy transfer from one resonator to the other, leading to the quick control of the vibration amplitude within the intrinsic ring-down time. We demonstrate rapid repetitive operations of a high-Q MEMS resonator by applying this technique to GaAs-based MEMS resonators through the piezoelectrically controlled parametric coupling. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MEMS / Resonator / Coupling / Control / GaAs |
| Paper # | R2014-33,EMD2014-38,CPM2014-53,OPE2014-63,LQE2014-37 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2014/8/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Quick control of the vibration amplitude in high-Q MEMS resonators |
| Sub Title (in English) | |
| Keyword(1) | MEMS |
| Keyword(2) | Resonator |
| Keyword(3) | Coupling |
| Keyword(4) | Control |
| Keyword(5) | GaAs |
| 1st Author's Name | Hajime OKAMOTO |
| 1st Author's Affiliation | NTT Basic Research Laboratories() |
| 2nd Author's Name | Imran MAHBOOB |
| 2nd Author's Affiliation | NTT Basic Research Laboratories |
| 3rd Author's Name | Koji ONOMITSU |
| 3rd Author's Affiliation | NTT Basic Research Laboratories |
| 4th Author's Name | Hiroshi YAMAGUCHI |
| 4th Author's Affiliation | NTT Basic Research Laboratories |
| Date | 2014-08-21 |
| Paper # | R2014-33,EMD2014-38,CPM2014-53,OPE2014-63,LQE2014-37 |
| Volume (vol) | vol.114 |
| Number (no) | 187 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |