| Presentation | 2014-07-17 Fabrication of ultra-high density nanodot arrays with high coercivity based on analysis of initial deposition process Hiroki HAGIWARA, Siggi WODARZ, Tomohiro OTANI, Daiki NISHIIE, Giovanni ZANGARI, Takayuki HOMMA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have attempted to fabricate ferromagnetic nanodot arrays for bit patterned media (BPM) by using electrochemical processes and lithography techniques. In this study, we fabricated hcp-Co_<80>Pt_<20> and Ll_0-FePt thin films and nanodot arrays onto hcp-Ru (002) / Si substrate and analyzed them. By using electron beam lithography with negative-type resist, electrodeposited Co-Pt nanodot arrays with 10 nm diameter and 25 nm pitch were uniformly fabricated. For controlling the initial deposition process, applied potential was changed during electrodeposition to surpress nucleation and promoting growth. As a result, the grain size was increased compared with the initial stage of the nucleation. The Fe-rich and Pt-rich multilayers were fabricated by pulse electrodeposition to enhance the phase transformation from fcc-Fe-Pt to Ll_0 Fe-Pt. By annealing at 650 ℃ and 500 ℃, the phase transformation from fcc-Fe-Pt to Ll_0 Fe-Pt was observed and Fe-Pt films with perpendicular coercivity of 13.4 kOe and 10.0 kOe. In addition, Fe-Pt nanodot arrays were successfully fabricated into the patterns formed using UV-nanoimprint lithography with such pulse electrodeposition. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | BPM / Electrodeposition / Co-Pt / Fe-Pt / Electron Beam Lithography / UV-Nanoimprint Lithography |
| Paper # | MR2014-9 |
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| Conference Information | |
| Committee | MR |
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| Conference Date | 2014/7/10(1days) |
| Place (in Japanese) | (See Japanese page) |
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| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Magnetic Recording (MR) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of ultra-high density nanodot arrays with high coercivity based on analysis of initial deposition process |
| Sub Title (in English) | |
| Keyword(1) | BPM |
| Keyword(2) | Electrodeposition |
| Keyword(3) | Co-Pt |
| Keyword(4) | Fe-Pt |
| Keyword(5) | Electron Beam Lithography |
| Keyword(6) | UV-Nanoimprint Lithography |
| 1st Author's Name | Hiroki HAGIWARA |
| 1st Author's Affiliation | Faculty of Science Engineering, Waseda University() |
| 2nd Author's Name | Siggi WODARZ |
| 2nd Author's Affiliation | Faculty of Science Engineering, Waseda University |
| 3rd Author's Name | Tomohiro OTANI |
| 3rd Author's Affiliation | Faculty of Science Engineering, Waseda University |
| 4th Author's Name | Daiki NISHIIE |
| 4th Author's Affiliation | Faculty of Science Engineering, Waseda University |
| 5th Author's Name | Giovanni ZANGARI |
| 5th Author's Affiliation | University of Virginia |
| 6th Author's Name | Takayuki HOMMA |
| 6th Author's Affiliation | Faculty of Science Engineering, Waseda University |
| Date | 2014-07-17 |
| Paper # | MR2014-9 |
| Volume (vol) | vol.114 |
| Number (no) | 140 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |