| Presentation | 2014-07-11 Estimation of parylen-C diaphragm deformation induced by molecular adsorption on a Fabry-Perot interferometric biosensor Yoshihiro MASUYA, Kazuhiro TAKAHASHI, Ryo OZAWA, Makoto ISHIDA, Kazuaki SAWADA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have recently developed a surface stress sensor based on a MEMS Fabry-Perot interferometer integrated with a photodiode, which utilizes the nonlinear optical transmittance change in the Fabry-Perot interference to enhance the sensitivity of the surface stress. Parylene-C was used as a deformable membrane in the sensor because of negligible residual stress and low Young's modulus of 2.8 GPa, which provides a large deformation with respect to molecular adsorption. After immobilization of 2-pg anti-BSA on the Fabry-Perot sensor, we measured about 50nm deformation by optical surface profiler and reflection spectrum. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MEMS Fabry-Perot interferometer / biosensor / label-free / surface-stress / protein |
| Paper # | ED2014-52 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2014/7/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Estimation of parylen-C diaphragm deformation induced by molecular adsorption on a Fabry-Perot interferometric biosensor |
| Sub Title (in English) | |
| Keyword(1) | MEMS Fabry-Perot interferometer |
| Keyword(2) | biosensor |
| Keyword(3) | label-free |
| Keyword(4) | surface-stress |
| Keyword(5) | protein |
| 1st Author's Name | Yoshihiro MASUYA |
| 1st Author's Affiliation | Toyohashi University of Technology() |
| 2nd Author's Name | Kazuhiro TAKAHASHI |
| 2nd Author's Affiliation | Toyohashi University of Technology |
| 3rd Author's Name | Ryo OZAWA |
| 3rd Author's Affiliation | Toyohashi University of Technology |
| 4th Author's Name | Makoto ISHIDA |
| 4th Author's Affiliation | Toyohashi University of Technology:EIIRIS, Toyohashi University of Technology |
| 5th Author's Name | Kazuaki SAWADA |
| 5th Author's Affiliation | Toyohashi University of Technology:EIIRIS, Toyohashi University of Technology |
| Date | 2014-07-11 |
| Paper # | ED2014-52 |
| Volume (vol) | vol.114 |
| Number (no) | 133 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |