Presentation | 2014-05-22 High-speed Response of SOI Lateral PIN-type Photodiode Fabricated bv CMOS Compatible Process Gen LI, Kazuaki MAEKITA, Takeo MARUYAMA, Koichi IIYAMA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We fabricated a lateral PIN-type Si photodetector on silicon-on-insulator (SOI) substrate by a complementarymetal-oxide-semiconductor (CMOS) compatible process. The devices were measured at the wavelength of 0.8 μm region. Receiving area is 23 x 23 μm^2, and electrode spacing is 3 μm with electrode width of 1 μm. The intrinsic region of the PIN-type Si photodetector is 1 μm. The dark current of 0.1 nA was obtained at the bias voltage of 10 V. The responsivity of 6.2 A/W, and high frequency response of 6.5 GHz was obtained at the bias voltage of -10 V at the wavelength of 850 nm. The maximum bandwidth of 8 GHz was obtained at the bias voltage of 30 V. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | CMOS compatible process / PIN-type Si photodetector / Silicon on insulator / Silicon photonics |
Paper # | LQE2014-1 |
Date of Issue |
Conference Information | |
Committee | LQE |
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Conference Date | 2014/5/15(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Lasers and Quantum Electronics (LQE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | High-speed Response of SOI Lateral PIN-type Photodiode Fabricated bv CMOS Compatible Process |
Sub Title (in English) | |
Keyword(1) | CMOS compatible process |
Keyword(2) | PIN-type Si photodetector |
Keyword(3) | Silicon on insulator |
Keyword(4) | Silicon photonics |
1st Author's Name | Gen LI |
1st Author's Affiliation | Graduate School of Natural Science and Technology, Kanazawa University() |
2nd Author's Name | Kazuaki MAEKITA |
2nd Author's Affiliation | Graduate School of Natural Science and Technology, Kanazawa University |
3rd Author's Name | Takeo MARUYAMA |
3rd Author's Affiliation | Graduate School of Natural Science and Technology, Kanazawa University |
4th Author's Name | Koichi IIYAMA |
4th Author's Affiliation | Graduate School of Natural Science and Technology, Kanazawa University |
Date | 2014-05-22 |
Paper # | LQE2014-1 |
Volume (vol) | vol.114 |
Number (no) | 46 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |