Presentation 2013-12-13
Wavelength Tuning Characteristics of Athermal VCSELs with Thermally Actuated MEMS Structure
Msanori NAKAHAMA, Hayato Sano, Takahiro SAKAGUCHI, Akihiro MATSUTANI, Fumio KOYAMA,
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Abstract(in English) We demonstrate the wavelength tuning of 850nm-GaAs-VCSELs with a controlled temperature dependence of wavelengths using a thermally and electrostatically actuated MEMS structure. The wavelength tuning and the control of the temperature dependence are independently realized. The result indicates a possibility of realizing tunable and athermal VCSELs with engineerd temperature dependence.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Diode Lasers / Vertical Cavity Surface Emitting Lasers / MEMS
Paper # LQE2013-127
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Committee LQE
Conference Date 2013/12/6(1days)
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Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Wavelength Tuning Characteristics of Athermal VCSELs with Thermally Actuated MEMS Structure
Sub Title (in English)
Keyword(1) Diode Lasers
Keyword(2) Vertical Cavity Surface Emitting Lasers
Keyword(3) MEMS
1st Author's Name Msanori NAKAHAMA
1st Author's Affiliation Photonics Integration System Research Center, P&I Lab., Tokyo Institute of Technology()
2nd Author's Name Hayato Sano
2nd Author's Affiliation Photonics Integration System Research Center, P&I Lab., Tokyo Institute of Technology
3rd Author's Name Takahiro SAKAGUCHI
3rd Author's Affiliation Photonics Integration System Research Center, P&I Lab., Tokyo Institute of Technology
4th Author's Name Akihiro MATSUTANI
4th Author's Affiliation Semiconductor and MEMS Processing Center, Tokyo Institute of Technology
5th Author's Name Fumio KOYAMA
5th Author's Affiliation Photonics Integration System Research Center, P&I Lab., Tokyo Institute of Technology
Date 2013-12-13
Paper # LQE2013-127
Volume (vol) vol.113
Number (no) 352
Page pp.pp.-
#Pages 4
Date of Issue