| Presentation | 2013-12-13 Quantum well intermixing using spin-on-glass and its application to VCSELs Tomohiro AKUTSU, Takuya USHIO, Asako KIKUCHI, Akihiro MATSUTANI, Tomoyuki MIYAMOTO, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The applicability of the quantum well intermixing using a spin-on-glass (SOG) to the fabrication process of a vertical cavity surface emitting laser (VCSEL) was investigated to control the carrier confinement in the active layer. The intermixing by using the non-doped SOG showed a large emission energy shift. The SOG coating of the mesa side-wall of the VCSEL and following heat-treatment are simple processes that can add to the conventional one. The fabricated VCSELs with a 30μm-square mesa and 15μm-diameter mesa showed lasing operation, and therefore the technique can be applicable as the VCSEL process for improving the performance of the small mesa devices. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | VCSEL / Quantum Well Intermixing / Spin-on-Glass |
| Paper # | LQE2013-126 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2013/12/6(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Quantum well intermixing using spin-on-glass and its application to VCSELs |
| Sub Title (in English) | |
| Keyword(1) | VCSEL |
| Keyword(2) | Quantum Well Intermixing |
| Keyword(3) | Spin-on-Glass |
| 1st Author's Name | Tomohiro AKUTSU |
| 1st Author's Affiliation | Photonics Integration System Research Center, P&I Lab., Tokyo Institute of Technology() |
| 2nd Author's Name | Takuya USHIO |
| 2nd Author's Affiliation | Photonics Integration System Research Center, P&I Lab., Tokyo Institute of Technology |
| 3rd Author's Name | Asako KIKUCHI |
| 3rd Author's Affiliation | Photonics Integration System Research Center, P&I Lab., Tokyo Institute of Technology |
| 4th Author's Name | Akihiro MATSUTANI |
| 4th Author's Affiliation | Photonics Integration System Research Center, P&I Lab., Tokyo Institute of Technology |
| 5th Author's Name | Tomoyuki MIYAMOTO |
| 5th Author's Affiliation | Photonics Integration System Research Center, P&I Lab., Tokyo Institute of Technology |
| Date | 2013-12-13 |
| Paper # | LQE2013-126 |
| Volume (vol) | vol.113 |
| Number (no) | 352 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |