Presentation 2013-12-20
Optical-path control by combining silicon waveguide and MEMS actuators : Feasibility of MEMS-tunable microring for wavelength selective switch
Kazuhiro HANE, Hoang Mann Chu,
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Abstract(in English) Silicon wire waveguide wavelength selective switch is proposed on the basis of microelectromechanical systems (MEMS) technology. A wide free spectral range (FSR) optical filter with resonant wavelength-tunable capacity is designed and fabricated. The tunable microring resonator is formed by two fixed and movable U-shaped silicon waveguides coupled with each other by two directional couplers. The circumference of the microring is tuned by using a low power consumption electrostatic comb actuator translating the movable waveguide. The waveguide couplers in microring are designed to compensate the wavelength dependence that is caused by varying the resonant wavelength of microring. The tunable microring resonator with a circumference of 19.1μm is designed and fabricated to obtain a 20 nm wide FSR. The resonant wavelength tunability for scanning over the full FSR was obtained. The switch mechanism between microring and busline waveguides is also designed and fabricated to construct the proposed wavelength selective switch, and the characteristics were evaluated.
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Keyword(in English) Silicon photonics / Silicon waveguide / Tunable microring / Wavelength selective switch
Paper # OPE2013-145
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Committee OPE
Conference Date 2013/12/13(1days)
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Registration To Optoelectronics (OPE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Optical-path control by combining silicon waveguide and MEMS actuators : Feasibility of MEMS-tunable microring for wavelength selective switch
Sub Title (in English)
Keyword(1) Silicon photonics
Keyword(2) Silicon waveguide
Keyword(3) Tunable microring
Keyword(4) Wavelength selective switch
1st Author's Name Kazuhiro HANE
1st Author's Affiliation Department of Nanomechanics, Tohoku University()
2nd Author's Name Hoang Mann Chu
2nd Author's Affiliation Department of Nanomechanics, Tohoku University
Date 2013-12-20
Paper # OPE2013-145
Volume (vol) vol.113
Number (no) 370
Page pp.pp.-
#Pages 6
Date of Issue