| Presentation | 2013-12-20 Metal mirror assisted grating couplers between multilayered waveguides toward 3D optical interconnects JoonHyun Kang, Yuki Atsumi, Yusuke Hayashi, Junichi Suzuki, Yuki Kuno, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Silicon photonics for optical interconnects can further improve the signal transmission density by introducing multilayered structure. In this work, we used grating couplers with metal mirrors for the inter-layer connection in multi-layered a-Si:H waveguides. The coupling efficiency of 90%, which was around 3 times higher than that without metal mirrors, was estimated by 3D-FDTD simulation. Devices were fabricated by process temperatures below 300℃ and the coupling efficiency of 83% was obtained for a device with the number of grating periods of 20. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Silicon Photonics / Amorphous silicon / Inter-layer coupling / Grating coupler / Metal mirror |
| Paper # | OPE2013-142 |
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| Conference Information | |
| Committee | OPE |
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| Conference Date | 2013/12/13(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Optoelectronics (OPE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Metal mirror assisted grating couplers between multilayered waveguides toward 3D optical interconnects |
| Sub Title (in English) | |
| Keyword(1) | Silicon Photonics |
| Keyword(2) | Amorphous silicon |
| Keyword(3) | Inter-layer coupling |
| Keyword(4) | Grating coupler |
| Keyword(5) | Metal mirror |
| 1st Author's Name | JoonHyun Kang |
| 1st Author's Affiliation | Dept. of Electrical and Electronic Engineering Tokyo Institute of Technology() |
| 2nd Author's Name | Yuki Atsumi |
| 2nd Author's Affiliation | Dept. of Electrical and Electronic Engineering Tokyo Institute of Technology |
| 3rd Author's Name | Yusuke Hayashi |
| 3rd Author's Affiliation | Dept. of Electrical and Electronic Engineering Tokyo Institute of Technology |
| 4th Author's Name | Junichi Suzuki |
| 4th Author's Affiliation | Dept. of Electrical and Electronic Engineering Tokyo Institute of Technology |
| 5th Author's Name | Yuki Kuno |
| 5th Author's Affiliation | Dept. of Electrical and Electronic Engineering Tokyo Institute of Technology |
| 6th Author's Name | Tomohiro Amemiya |
| 6th Author's Affiliation | Quantum Nanoelectronics Research Center, Tokyo Institute of Technology |
| 7th Author's Name | Nobuhiko Nishiyama |
| 7th Author's Affiliation | Dept. of Electrical and Electronic Engineering Tokyo Institute of Technology |
| 8th Author's Name | Shigehisa Arai |
| 8th Author's Affiliation | Dept. of Electrical and Electronic Engineering Tokyo Institute of Technology:Quantum Nanoelectronics Research Center, Tokyo Institute of Technology |
| Date | 2013-12-20 |
| Paper # | OPE2013-142 |
| Volume (vol) | vol.113 |
| Number (no) | 370 |
| Page | pp.pp.- |
| #Pages | 6 |
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