Presentation | 2014-05-28 Fabrication of Perovskite-type Iron and Manganese Oxides Using Highly Dense Targets by Pulsed Laser Deposition Method Keisuke Oshima, Nobuyuki Iwata, Yuta Watabe, Takaaki Inaba, Takuya Hashimoto, Kouichi Takase, Hiroshi Yamamoto, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | LFO and CFO films are deposited by PLD method. Targets are calcined using powder prepared by traditional solid solution (SS) and Pechini method. The targets surface is quite smooth after ablation in both LFO and CFO cases, probably due to the homogeneous distribution of each atom in the target. Density of the target by Pechini is 95.5% and 96.4% for LFO and CFO. The surface of the CFO film using Pechini target shows step-terraces structure. Thickness difference between deposited film and estimated thickness from the periodicity of RHEED oscillation around the initial growth region is -48% and +6.3% using SS target and Pechini target, respectively. It reveals that the precise control of deposition rate is achived using Pechini target. The volume calculated from the XRD results of LFO thin film is correspondence with that of bulk within 0.4%. In the case of CFO thin film, the unit volume is of CFO2.5. The required growth period is doubled after 5 units growth comparing to that before 3 units growth. The probability of growth of the grain with 0.7 nm in height increased from 18% to 34% before and after 3/5 units growth. It is expected that the CFO2.5 grew with the doubled lattice constant along the normal direction of the surface. Highly dense target prepared by Pechini method is promising target to obtain high quality thin films. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | PLD Method / Pechini Method / Ultra High density target / Perovskite Oxide |
Paper # | ED2014-26,CPM2014-9,SDM2014-24 |
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Conference Information | |
Committee | SDM |
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Conference Date | 2014/5/21(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Silicon Device and Materials (SDM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Fabrication of Perovskite-type Iron and Manganese Oxides Using Highly Dense Targets by Pulsed Laser Deposition Method |
Sub Title (in English) | |
Keyword(1) | PLD Method |
Keyword(2) | Pechini Method |
Keyword(3) | Ultra High density target |
Keyword(4) | Perovskite Oxide |
1st Author's Name | Keisuke Oshima |
1st Author's Affiliation | College of Science and Technology, Nihon University() |
2nd Author's Name | Nobuyuki Iwata |
2nd Author's Affiliation | College of Science and Technology, Nihon University |
3rd Author's Name | Yuta Watabe |
3rd Author's Affiliation | College of Science and Technology, Nihon University |
4th Author's Name | Takaaki Inaba |
4th Author's Affiliation | College of Science and Technology, Nihon University |
5th Author's Name | Takuya Hashimoto |
5th Author's Affiliation | College of Humanities and Sciences, Nihon University |
6th Author's Name | Kouichi Takase |
6th Author's Affiliation | College of Science and Technology, Nihon University |
7th Author's Name | Hiroshi Yamamoto |
7th Author's Affiliation | College of Science and Technology, Nihon University |
Date | 2014-05-28 |
Paper # | ED2014-26,CPM2014-9,SDM2014-24 |
Volume (vol) | vol.114 |
Number (no) | 58 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |