Presentation | 2014-05-29 Photo-response of photochemically deposited SnO_2 thin films Takanori Hounoki, Masaya Ichimura, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | SnO_2 is an oxide semiconductor with a band gap of 3.6-3.8 eV and is regarded as promising for gas sensers and UV detectors. We characterized photo sensitivity of SnO_2 thin films deposited by photochemical deposition (PCD) method. The 0.1μm-thick films were deposited on glass substrates and then annealed in N_2 atmosphere. When irradiated with light of the AM1.5 spectrum for 1 hour, the resistance decreased by two order of magnitude for 1mW/cm^2 irradiation and three orders of magnitude for 100 mW/cm^2 irradiation. After the light was turned off, the resistance increased slowly and approached to the initial value after several hours. Almost the same photo response was observed even if the UV range was cut by a filter. Thus the films show high sensitivity even for below-band gap photo irradiation. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | SnO_2 / photochemical deposition / photo conductance |
Paper # | ED2014-42,CPM2014-25,SDM2014-40 |
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Committee | ED |
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Conference Date | 2014/5/21(1days) |
Place (in Japanese) | (See Japanese page) |
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Registration To | Electron Devices (ED) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Photo-response of photochemically deposited SnO_2 thin films |
Sub Title (in English) | |
Keyword(1) | SnO_2 |
Keyword(2) | photochemical deposition |
Keyword(3) | photo conductance |
1st Author's Name | Takanori Hounoki |
1st Author's Affiliation | Department of Engineering Physics, Electronics and Mechanics, Nagoya Institute of Technology() |
2nd Author's Name | Masaya Ichimura |
2nd Author's Affiliation | Department of Engineering Physics, Electronics and Mechanics, Nagoya Institute of Technology |
Date | 2014-05-29 |
Paper # | ED2014-42,CPM2014-25,SDM2014-40 |
Volume (vol) | vol.114 |
Number (no) | 56 |
Page | pp.pp.- |
#Pages | 5 |
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