Presentation 2014-05-28
Fabrication of Perovskite-type Iron and Manganese Oxides Using Highly Dense Targets by Pulsed Laser Deposition Method
Keisuke Oshima, Nobuyuki Iwata, Yuta Watabe, Takaaki Inaba, Takuya Hashimoto, Kouichi Takase, Hiroshi Yamamoto,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) LFO and CFO films are deposited by PLD method. Targets are calcined using powder prepared by traditional solid solution (SS) and Pechini method. The targets surface is quite smooth after ablation in both LFO and CFO cases, probably due to the homogeneous distribution of each atom in the target. Density of the target by Pechini is 95.5% and 96.4% for LFO and CFO. The surface of the CFO film using Pechini target shows step-terraces structure. Thickness difference between deposited film and estimated thickness from the periodicity of RHEED oscillation around the initial growth region is -48% and +6.3% using SS target and Pechini target, respectively. It reveals that the precise control of deposition rate is achived using Pechini target. The volume calculated from the XRD results of LFO thin film is correspondence with that of bulk within 0.4%. In the case of CFO thin film, the unit volume is of CFO2.5. The required growth period is doubled after 5 units growth comparing to that before 3 units growth. The probability of growth of the grain with 0.7 nm in height increased from 18% to 34% before and after 3/5 units growth. It is expected that the CFO2.5 grew with the doubled lattice constant along the normal direction of the surface. Highly dense target prepared by Pechini method is promising target to obtain high quality thin films.
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Keyword(in English) PLD Method / Pechini Method / Ultra High density target / Perovskite Oxide
Paper # ED2014-26,CPM2014-9,SDM2014-24
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Committee ED
Conference Date 2014/5/21(1days)
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Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication of Perovskite-type Iron and Manganese Oxides Using Highly Dense Targets by Pulsed Laser Deposition Method
Sub Title (in English)
Keyword(1) PLD Method
Keyword(2) Pechini Method
Keyword(3) Ultra High density target
Keyword(4) Perovskite Oxide
1st Author's Name Keisuke Oshima
1st Author's Affiliation College of Science and Technology, Nihon University()
2nd Author's Name Nobuyuki Iwata
2nd Author's Affiliation College of Science and Technology, Nihon University
3rd Author's Name Yuta Watabe
3rd Author's Affiliation College of Science and Technology, Nihon University
4th Author's Name Takaaki Inaba
4th Author's Affiliation College of Science and Technology, Nihon University
5th Author's Name Takuya Hashimoto
5th Author's Affiliation College of Humanities and Sciences, Nihon University
6th Author's Name Kouichi Takase
6th Author's Affiliation College of Science and Technology, Nihon University
7th Author's Name Hiroshi Yamamoto
7th Author's Affiliation College of Science and Technology, Nihon University
Date 2014-05-28
Paper # ED2014-26,CPM2014-9,SDM2014-24
Volume (vol) vol.114
Number (no) 56
Page pp.pp.-
#Pages 6
Date of Issue