| Presentation | 2014-05-29 Investigation of laser scribing in fabrication of nitride-based LEDs for improvement of light extraction efficiency Shun HANAI, Atsushi SUZUKI, Tsukasa KITANO, Daisuke IIDA, Takahisa KATO, Motoaki IWAYA, Tetsuya TAKEUCHI, Satoshi KAMIYAMA, Isamu AKASAKI, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | For reduction of a manufacturing cost of the light-emitting-diode (LED), it is necessary to reduce the distance of individual devices. Laser scribing method is suitable to break wafer into narrow chips, and it enables precise and high throughput production. However, on the side wall of the laser scribed grooves, aluminum-rich amorphous oxide product, which causes the light absorption loss, is formed, after the irradiation of the laser beam. To solve this problem, we propose a new LED fabrication procedure. As a result of the new process, 25% improvement of the light output in a flip chip type blue LED was obtained. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Nitride-Based LED / laser process / light extraction efficiency / hot phosphoric acid / amorphous oxide |
| Paper # | ED2014-31,CPM2014-14,SDM2014-29 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
|---|---|
| Conference Date | 2014/5/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Investigation of laser scribing in fabrication of nitride-based LEDs for improvement of light extraction efficiency |
| Sub Title (in English) | |
| Keyword(1) | Nitride-Based LED |
| Keyword(2) | laser process |
| Keyword(3) | light extraction efficiency |
| Keyword(4) | hot phosphoric acid |
| Keyword(5) | amorphous oxide |
| 1st Author's Name | Shun HANAI |
| 1st Author's Affiliation | Faculty of Science and Technology, Meijo University() |
| 2nd Author's Name | Atsushi SUZUKI |
| 2nd Author's Affiliation | ELSEED Corporation |
| 3rd Author's Name | Tsukasa KITANO |
| 3rd Author's Affiliation | ELSEED Corporation |
| 4th Author's Name | Daisuke IIDA |
| 4th Author's Affiliation | Faculty of Science and Technology, Meijo University |
| 5th Author's Name | Takahisa KATO |
| 5th Author's Affiliation | Faculty of Science and Technology, Meijo University |
| 6th Author's Name | Motoaki IWAYA |
| 6th Author's Affiliation | Faculty of Science and Technology, Meijo University |
| 7th Author's Name | Tetsuya TAKEUCHI |
| 7th Author's Affiliation | Faculty of Science and Technology, Meijo University |
| 8th Author's Name | Satoshi KAMIYAMA |
| 8th Author's Affiliation | Faculty of Science and Technology, Meijo University |
| 9th Author's Name | Isamu AKASAKI |
| 9th Author's Affiliation | Faculty of Science and Technology, Meijo University:Akasaki Research Center, Nagoya University |
| Date | 2014-05-29 |
| Paper # | ED2014-31,CPM2014-14,SDM2014-29 |
| Volume (vol) | vol.114 |
| Number (no) | 57 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |