| Presentation | 2013-11-29 Development of Connected Pillar AlN Buffer for AlGaN deep-UV LEDs Shiro TOYODA, Hideki HIRAYAMA, Norihiko KAMATA, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A connected-pillar AlN buffer structure fabricated on sapphire substrate is considered to be quite effective for increasing efficiency of AlGaN based deep-ultraviolet (DUV) LEDs, because of improving internal quantum efficiency (IQE) due to reduced threading-dislocation density (TDD), and light-extraction efficiency (LEE). In this study, we demonstrated the fabrication of connected-pillar AlN structure buffer on patterned-sapphire substrates (PSS) by using an 'NH_3 pulsed flow multi-layer growth' method and an epitaxial lateral overgrowth (ELO). |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | DUV-LED / MOCVD / AlN / AlGaN / Connected pillar |
| Paper # | ED2013-85,CPM2013-144,LQE2013-120 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2013/11/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of Connected Pillar AlN Buffer for AlGaN deep-UV LEDs |
| Sub Title (in English) | |
| Keyword(1) | DUV-LED |
| Keyword(2) | MOCVD |
| Keyword(3) | AlN |
| Keyword(4) | AlGaN |
| Keyword(5) | Connected pillar |
| 1st Author's Name | Shiro TOYODA |
| 1st Author's Affiliation | RIKEN:Saitama University() |
| 2nd Author's Name | Hideki HIRAYAMA |
| 2nd Author's Affiliation | RIKEN |
| 3rd Author's Name | Norihiko KAMATA |
| 3rd Author's Affiliation | Saitama University |
| Date | 2013-11-29 |
| Paper # | ED2013-85,CPM2013-144,LQE2013-120 |
| Volume (vol) | vol.113 |
| Number (no) | 331 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |