Presentation | 2013-11-28 Texture formation by anisotropic dry etching of m-plane GaN, and light extraction efficiency improvement of textured m-plane GaN LED Toshiyuki Fujita, Atsushi Yamada, Akira Inoue, Ryou Kato, Toshiya Yokokawa, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We studied improvement of light extract efficiency(LEE) about non-polar m-plane GaN LED. We simulated the LEE, concluded that the best texture structure is both the angle over 40deg. and the filling ratio 80%. We found the 3planes of these stable facets to satisfy the simulated texture is both the angle 40deg. over. We succeeded in the fabrication of these facets to take the dry etching which is anisotropic dry etching assist chemical etching effect. The light output of LED with texture ysing chemically stable facets is enhanced by 1.44 times comparing with mirror surfaces. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | non-polar / GaN / LED / light extract efficiency / dry etching / texture / facet |
Paper # | ED2013-65,CPM2013-124,LQE2013-100 |
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Conference Information | |
Committee | LQE |
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Conference Date | 2013/11/21(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Lasers and Quantum Electronics (LQE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Texture formation by anisotropic dry etching of m-plane GaN, and light extraction efficiency improvement of textured m-plane GaN LED |
Sub Title (in English) | |
Keyword(1) | non-polar |
Keyword(2) | GaN |
Keyword(3) | LED |
Keyword(4) | light extract efficiency |
Keyword(5) | dry etching |
Keyword(6) | texture |
Keyword(7) | facet |
1st Author's Name | Toshiyuki Fujita |
1st Author's Affiliation | Green Innovation development Center Corporate Engineering Division Automotive & Industrial Systems Company Panasonic Corporation() |
2nd Author's Name | Atsushi Yamada |
2nd Author's Affiliation | Green Innovation development Center Corporate Engineering Division Automotive & Industrial Systems Company Panasonic Corporation |
3rd Author's Name | Akira Inoue |
3rd Author's Affiliation | Green Innovation development Center Corporate Engineering Division Automotive & Industrial Systems Company Panasonic Corporation |
4th Author's Name | Ryou Kato |
4th Author's Affiliation | Green Innovation development Center Corporate Engineering Division Automotive & Industrial Systems Company Panasonic Corporation |
5th Author's Name | Toshiya Yokokawa |
5th Author's Affiliation | Green Innovation development Center Corporate Engineering Division Automotive & Industrial Systems Company Panasonic Corporation |
Date | 2013-11-28 |
Paper # | ED2013-65,CPM2013-124,LQE2013-100 |
Volume (vol) | vol.113 |
Number (no) | 331 |
Page | pp.pp.- |
#Pages | 5 |
Date of Issue |