Presentation 2013-11-28
Texture formation by anisotropic dry etching of m-plane GaN, and light extraction efficiency improvement of textured m-plane GaN LED
Toshiyuki Fujita, Atsushi Yamada, Akira Inoue, Ryou Kato, Toshiya Yokokawa,
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Abstract(in English) We studied improvement of light extract efficiency(LEE) about non-polar m-plane GaN LED. We simulated the LEE, concluded that the best texture structure is both the angle over 40deg. and the filling ratio 80%. We found the 3planes of these stable facets to satisfy the simulated texture is both the angle 40deg. over. We succeeded in the fabrication of these facets to take the dry etching which is anisotropic dry etching assist chemical etching effect. The light output of LED with texture ysing chemically stable facets is enhanced by 1.44 times comparing with mirror surfaces.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) non-polar / GaN / LED / light extract efficiency / dry etching / texture / facet
Paper # ED2013-65,CPM2013-124,LQE2013-100
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Conference Information
Committee LQE
Conference Date 2013/11/21(1days)
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Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Texture formation by anisotropic dry etching of m-plane GaN, and light extraction efficiency improvement of textured m-plane GaN LED
Sub Title (in English)
Keyword(1) non-polar
Keyword(2) GaN
Keyword(3) LED
Keyword(4) light extract efficiency
Keyword(5) dry etching
Keyword(6) texture
Keyword(7) facet
1st Author's Name Toshiyuki Fujita
1st Author's Affiliation Green Innovation development Center Corporate Engineering Division Automotive & Industrial Systems Company Panasonic Corporation()
2nd Author's Name Atsushi Yamada
2nd Author's Affiliation Green Innovation development Center Corporate Engineering Division Automotive & Industrial Systems Company Panasonic Corporation
3rd Author's Name Akira Inoue
3rd Author's Affiliation Green Innovation development Center Corporate Engineering Division Automotive & Industrial Systems Company Panasonic Corporation
4th Author's Name Ryou Kato
4th Author's Affiliation Green Innovation development Center Corporate Engineering Division Automotive & Industrial Systems Company Panasonic Corporation
5th Author's Name Toshiya Yokokawa
5th Author's Affiliation Green Innovation development Center Corporate Engineering Division Automotive & Industrial Systems Company Panasonic Corporation
Date 2013-11-28
Paper # ED2013-65,CPM2013-124,LQE2013-100
Volume (vol) vol.113
Number (no) 331
Page pp.pp.-
#Pages 5
Date of Issue