Presentation 2013-11-27
Circuit design for 3D-stacking using TSV interconnects
Kenichi Osada, Futoshi Furuta, Kenichi Takeda,
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Abstract(in English) To improve the performance of 3D-stacking using TSV interconnects, circuit techniques were developed. To improve Z-axis transmission performance, a wafer-to-wafer stacking process for lowering the capacitance of TSV was developed. An "embedded TSV" design for the shorter on-chip wirings was also devised. Z-axis transmission performance was the highest, namely, 15 Tbps/W. TSV circuit model is proposed for circuit design of 3D transmission. Moreover, to reduce the clock skew between the stacked layers arising from global process variations, a 3D clock-synchronization scheme using a reference clock via TSVs was developed. The clock skew between two layers was reduced by 60% using the new clock scheme. We present the first demonstration of two stacked FPGA layers by using wafer-to-wafer via-last Cu-TSV process
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Keyword(in English) TSV / 3D / FPGA / Synchronization scheme
Paper # VLD2013-73,CPM2013-117,ICD2013-94,CPSY2013-58,DC2013-39,RECONF2013-41
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Committee DC
Conference Date 2013/11/20(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
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Title (in English) Circuit design for 3D-stacking using TSV interconnects
Sub Title (in English)
Keyword(1) TSV
Keyword(2) 3D
Keyword(3) FPGA
Keyword(4) Synchronization scheme
1st Author's Name Kenichi Osada
1st Author's Affiliation Central Research Laboratory, Hitachi, Ltd.()
2nd Author's Name Futoshi Furuta
2nd Author's Affiliation Central Research Laboratory, Hitachi, Ltd.
3rd Author's Name Kenichi Takeda
3rd Author's Affiliation Central Research Laboratory, Hitachi, Ltd.
Date 2013-11-27
Paper # VLD2013-73,CPM2013-117,ICD2013-94,CPSY2013-58,DC2013-39,RECONF2013-41
Volume (vol) vol.113
Number (no) 321
Page pp.pp.-
#Pages 4
Date of Issue