Presentation | 2013/11/20 Minimal fab : One by one manufacturing of devices Shiro Hara, Hitoshi Maekawa, Shinichi Ikeda, Shizuka Nakano, Sommawan Khumpuang, |
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Abstract(in Japanese) | (See Japanese page) |
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Paper # | Vol.2013-SLDM-163 No.5 |
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Committee | DC |
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Conference Date | 2013/11/20(1days) |
Place (in Japanese) | (See Japanese page) |
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Registration To | Dependable Computing (DC) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Minimal fab : One by one manufacturing of devices |
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1st Author's Name | Shiro Hara |
1st Author's Affiliation | The National Institute of Advanced Industrial Science and Technology() |
2nd Author's Name | Hitoshi Maekawa |
2nd Author's Affiliation | The National Institute of Advanced Industrial Science and Technology |
3rd Author's Name | Shinichi Ikeda |
3rd Author's Affiliation | The National Institute of Advanced Industrial Science and Technology |
4th Author's Name | Shizuka Nakano |
4th Author's Affiliation | The National Institute of Advanced Industrial Science and Technology |
5th Author's Name | Sommawan Khumpuang |
5th Author's Affiliation | The National Institute of Advanced Industrial Science and Technology |
Date | 2013/11/20 |
Paper # | Vol.2013-SLDM-163 No.5 |
Volume (vol) | vol.113 |
Number (no) | 321 |
Page | pp.pp.- |
#Pages | 24 |
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