Presentation 2014-04-11
Photoconductivity of Si Films on glass after Blue Multi-Laser Diode Annealing
Koswaththage Charith Jayanada, Satoshi Chinen, Kouya Sugihara, Tatsuya Okada, Takashi Noguchi,
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Abstract(in English) Photoconductivity of BLDA applied Si film was examined for the aim of multi-functional optical sensor application of the Si film on glass. Photoconductivity was increased due to the formation of large grains with the increase of laser power from 4 to 6 W. Furthermore, Si film crystallized by laser irradiation has been subjected to low-temperature annealing at 450℃ for 1h in H_2/N_2 (4%) gas atmosphere. Photosensitivity ratio of 94 (σ_/ σ_) was obtained under white light of 100 mW/cm^2 in Si film of BLDA after irradiation at 6 W. It is considered light sensitivity was improved by the decrease of defects density in the Si film. The crystallization by BLDA is promising for application to the optical sensor of a multi-function system on panel is suggested from these results.
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Keyword(in English) Silicon / Laser annealing / Crystallization / Photoconductive characteristic
Paper # SDM2014-15,OME2014-15
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Committee OME
Conference Date 2014/4/3(1days)
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Registration To Organic Material Electronics (OME)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Photoconductivity of Si Films on glass after Blue Multi-Laser Diode Annealing
Sub Title (in English)
Keyword(1) Silicon
Keyword(2) Laser annealing
Keyword(3) Crystallization
Keyword(4) Photoconductive characteristic
1st Author's Name Koswaththage Charith Jayanada
1st Author's Affiliation Faculty of Engineering, University of the Ryukyus()
2nd Author's Name Satoshi Chinen
2nd Author's Affiliation Faculty of Engineering, University of the Ryukyus
3rd Author's Name Kouya Sugihara
3rd Author's Affiliation Faculty of Engineering, University of the Ryukyus
4th Author's Name Tatsuya Okada
4th Author's Affiliation Faculty of Engineering, University of the Ryukyus
5th Author's Name Takashi Noguchi
5th Author's Affiliation Faculty of Engineering, University of the Ryukyus
Date 2014-04-11
Paper # SDM2014-15,OME2014-15
Volume (vol) vol.114
Number (no) 2
Page pp.pp.-
#Pages 3
Date of Issue