| Presentation | 2014-04-11 Fabrication of poly-Si TFT with low-temperature process using BLDA Kiyoharu Shimoda, Kouya Sugihara, Kimihiko Imura, Tatsuya Okada, Takashi Noguchi, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Poly-Si TFTs by low cost fabrication process are required on glass as well as on flexible panel. Top-gate-type TFT without ion-implantation was fabricated with ultra-low temperature process below 400℃ using BLDA. Ti was adopted for source and drain. High performance TFTs formed by low cost process are expected on plastic and on flexible sheet using BLDA. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | TFT / Low temperature / Silicon / Crystallization / Laser annealing |
| Paper # | SDM2014-14,OME2014-14 |
| Date of Issue |
| Conference Information | |
| Committee | OME |
|---|---|
| Conference Date | 2014/4/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of poly-Si TFT with low-temperature process using BLDA |
| Sub Title (in English) | |
| Keyword(1) | TFT |
| Keyword(2) | Low temperature |
| Keyword(3) | Silicon |
| Keyword(4) | Crystallization |
| Keyword(5) | Laser annealing |
| 1st Author's Name | Kiyoharu Shimoda |
| 1st Author's Affiliation | Faculty of Engineering, University of the Ryukyus() |
| 2nd Author's Name | Kouya Sugihara |
| 2nd Author's Affiliation | Faculty of Engineering, University of the Ryukyus |
| 3rd Author's Name | Kimihiko Imura |
| 3rd Author's Affiliation | Faculty of Engineering, University of the Ryukyus |
| 4th Author's Name | Tatsuya Okada |
| 4th Author's Affiliation | Faculty of Engineering, University of the Ryukyus |
| 5th Author's Name | Takashi Noguchi |
| 5th Author's Affiliation | Faculty of Engineering, University of the Ryukyus |
| Date | 2014-04-11 |
| Paper # | SDM2014-14,OME2014-14 |
| Volume (vol) | vol.114 |
| Number (no) | 2 |
| Page | pp.pp.- |
| #Pages | 3 |
| Date of Issue | |