| Presentation | 2014-04-11 Study on Crystal Growth of Polycrystalline Si at Low Temperature : For High Performance Flexible Display Naoya KAWAMOTO, Kazuyuki TADATOMO, Akira HEYA, Naoto MATSUO, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Polycrystalline (poly-) Si film by laser annealing is attractive for thin film transistor on a polymer substrate as well as on a glass substrate. We have proposed a visible-laser-induced lateral crystallization (VILC) for decreasing process temperature. Visible laser is irradiated onto a polycrystalline Si film before or after ultraviolet laser irradiation. Lateral growth is enhanced by visible laser heating at the grain boundary since the absorbance of the grain boundary is larger than that of the in-grain. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | polycrystalline Si / laser annealing / secondary grain growth / solid phase crystallization |
| Paper # | SDM2014-12,OME2014-12 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2014/4/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study on Crystal Growth of Polycrystalline Si at Low Temperature : For High Performance Flexible Display |
| Sub Title (in English) | |
| Keyword(1) | polycrystalline Si |
| Keyword(2) | laser annealing |
| Keyword(3) | secondary grain growth |
| Keyword(4) | solid phase crystallization |
| 1st Author's Name | Naoya KAWAMOTO |
| 1st Author's Affiliation | Yamaguchi University() |
| 2nd Author's Name | Kazuyuki TADATOMO |
| 2nd Author's Affiliation | Yamaguchi University |
| 3rd Author's Name | Akira HEYA |
| 3rd Author's Affiliation | University of Hyogo |
| 4th Author's Name | Naoto MATSUO |
| 4th Author's Affiliation | University of Hyogo |
| Date | 2014-04-11 |
| Paper # | SDM2014-12,OME2014-12 |
| Volume (vol) | vol.114 |
| Number (no) | 2 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |