Presentation | 2014-04-11 Fabrication of High-Performance Poly-Si TFTs with Highly Biaxially-Oriented Poly-Si Thin Films by Double-Line Beam Continuous-Wave Laser Lateral Crystallization Masayuki YAMANO, Shin-Ichiro KUROKI, Tadashi SATO, Koji KOTANI, Takamaro KIKKAWA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Highly biaxially oriented poly-Si thin films were formed by double-line beam continuous-wave laser lateral crystallization (DLB-CLC). Crystallinities of the poly-Si thin films were (110), (111), and (211) for the laser scan, transverse, and surface directions, respectively. Silicon grains were elongated in the laser scan direction and one-dimensionally very large silicon grains with lengths of more than 100 μm were fabricated. Using these poly-Si thin films, low-temperature poly-Si TFTs were fabricated at low temperature (≪550℃) and a TFT with a high electron field effect mobility of μ_ |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | TFT / Laser crystallization / Poly-Si / CLC |
Paper # | SDM2014-11,OME2014-11 |
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Conference Information | |
Committee | OME |
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Conference Date | 2014/4/3(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Organic Material Electronics (OME) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Fabrication of High-Performance Poly-Si TFTs with Highly Biaxially-Oriented Poly-Si Thin Films by Double-Line Beam Continuous-Wave Laser Lateral Crystallization |
Sub Title (in English) | |
Keyword(1) | TFT |
Keyword(2) | Laser crystallization |
Keyword(3) | Poly-Si |
Keyword(4) | CLC |
1st Author's Name | Masayuki YAMANO |
1st Author's Affiliation | Institute for Nanodevice and Bio Systems, Hiroshima University (RNBS)() |
2nd Author's Name | Shin-Ichiro KUROKI |
2nd Author's Affiliation | Institute for Nanodevice and Bio Systems, Hiroshima University (RNBS) |
3rd Author's Name | Tadashi SATO |
3rd Author's Affiliation | Institute for Nanodevice and Bio Systems, Hiroshima University (RNBS) |
4th Author's Name | Koji KOTANI |
4th Author's Affiliation | Graduate School of Engineering, Tohoku University |
5th Author's Name | Takamaro KIKKAWA |
5th Author's Affiliation | Institute for Nanodevice and Bio Systems, Hiroshima University (RNBS) |
Date | 2014-04-11 |
Paper # | SDM2014-11,OME2014-11 |
Volume (vol) | vol.114 |
Number (no) | 2 |
Page | pp.pp.- |
#Pages | 5 |
Date of Issue |