| Presentation | 2014-04-11 Fabrication of High-Performance Poly-Si TFTs with Highly Biaxially-Oriented Poly-Si Thin Films by Double-Line Beam Continuous-Wave Laser Lateral Crystallization Masayuki YAMANO, Shin-Ichiro KUROKI, Tadashi SATO, Koji KOTANI, Takamaro KIKKAWA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Highly biaxially oriented poly-Si thin films were formed by double-line beam continuous-wave laser lateral crystallization (DLB-CLC). Crystallinities of the poly-Si thin films were (110), (111), and (211) for the laser scan, transverse, and surface directions, respectively. Silicon grains were elongated in the laser scan direction and one-dimensionally very large silicon grains with lengths of more than 100 μm were fabricated. Using these poly-Si thin films, low-temperature poly-Si TFTs were fabricated at low temperature (≪550℃) and a TFT with a high electron field effect mobility of μ_ |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | TFT / Laser crystallization / Poly-Si / CLC |
| Paper # | SDM2014-11,OME2014-11 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2014/4/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of High-Performance Poly-Si TFTs with Highly Biaxially-Oriented Poly-Si Thin Films by Double-Line Beam Continuous-Wave Laser Lateral Crystallization |
| Sub Title (in English) | |
| Keyword(1) | TFT |
| Keyword(2) | Laser crystallization |
| Keyword(3) | Poly-Si |
| Keyword(4) | CLC |
| 1st Author's Name | Masayuki YAMANO |
| 1st Author's Affiliation | Institute for Nanodevice and Bio Systems, Hiroshima University (RNBS)() |
| 2nd Author's Name | Shin-Ichiro KUROKI |
| 2nd Author's Affiliation | Institute for Nanodevice and Bio Systems, Hiroshima University (RNBS) |
| 3rd Author's Name | Tadashi SATO |
| 3rd Author's Affiliation | Institute for Nanodevice and Bio Systems, Hiroshima University (RNBS) |
| 4th Author's Name | Koji KOTANI |
| 4th Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 5th Author's Name | Takamaro KIKKAWA |
| 5th Author's Affiliation | Institute for Nanodevice and Bio Systems, Hiroshima University (RNBS) |
| Date | 2014-04-11 |
| Paper # | SDM2014-11,OME2014-11 |
| Volume (vol) | vol.114 |
| Number (no) | 2 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |