| Presentation | 2014-04-11 High performance LT poly-Si TFTs on glass substrate by using lateral large grained thin poly-Si film Akito Hara, Shinya Kamo, Shun Sasaki, Tatsuya Meguro, Tadashi Sato, Kuninori Kitahara, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | To improve the performance of LT poly-Si TFTs on cheap glass substrates, such as those used in FPD, approaches that do not depend only on scaling are required. In this paper, we report the high performance of self-aligned metal double-gate LT poly-Si TFTs, four-terminal metal double-gate LT poly-Si TFTs, and sputtered high-k LT poly-Si TFTs, in which the channel region consists of a lateral large-grained thin poly-Si film. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | poly-Si / TFT / double gate / four-terminal |
| Paper # | SDM2014-10,OME2014-10 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2014/4/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | High performance LT poly-Si TFTs on glass substrate by using lateral large grained thin poly-Si film |
| Sub Title (in English) | |
| Keyword(1) | poly-Si |
| Keyword(2) | TFT |
| Keyword(3) | double gate |
| Keyword(4) | four-terminal |
| 1st Author's Name | Akito Hara |
| 1st Author's Affiliation | Faculty of Engineering, Tohoku Gakuin University() |
| 2nd Author's Name | Shinya Kamo |
| 2nd Author's Affiliation | Faculty of Engineering, Tohoku Gakuin University |
| 3rd Author's Name | Shun Sasaki |
| 3rd Author's Affiliation | Faculty of Engineering, Tohoku Gakuin University |
| 4th Author's Name | Tatsuya Meguro |
| 4th Author's Affiliation | Faculty of Engineering, Tohoku Gakuin University |
| 5th Author's Name | Tadashi Sato |
| 5th Author's Affiliation | RNBS, Hiroshima University |
| 6th Author's Name | Kuninori Kitahara |
| 6th Author's Affiliation | Interdisciplinary Faculty of Science and Engineering, Shimane University |
| Date | 2014-04-11 |
| Paper # | SDM2014-10,OME2014-10 |
| Volume (vol) | vol.114 |
| Number (no) | 2 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |