Presentation | 2014-04-10 Effect of substrates on Al-induced crystallized Ge layers on insulating films and its application to flexible substrates Naoki OYA, Kaoru TOKO, Ryohei NUMATA, Koki NAKAZAWA, Noritaka USAMI, Takashi SUEMASU, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | For fabricating next-generation flexible devices simultaneously allowing for high performance and low cost, we developed an Al-induced crystallized Ge layer on a plastic substrate, polyimide. By preparing an insulating film on the plastic substrate, we achieved a satisfactory layer exchange. Moreover, we revealed that the crystal quality of the resulting Ge layer strongly depended on the thickness of substrates. Finally, by employing a thick (125 μm) plastic substrate, we succeeded in forming the (111)-oriented Ge layer of large grains, which had equal crystallinity to AIC-Ge formed on a glass substrate. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Germanium / Thin film / Metal-induced crystallization / Flexible device |
Paper # | SDM2014-7,OME2014-7 |
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Conference Information | |
Committee | OME |
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Conference Date | 2014/4/3(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Organic Material Electronics (OME) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Effect of substrates on Al-induced crystallized Ge layers on insulating films and its application to flexible substrates |
Sub Title (in English) | |
Keyword(1) | Germanium |
Keyword(2) | Thin film |
Keyword(3) | Metal-induced crystallization |
Keyword(4) | Flexible device |
1st Author's Name | Naoki OYA |
1st Author's Affiliation | University of Tsukuba() |
2nd Author's Name | Kaoru TOKO |
2nd Author's Affiliation | University of Tsukuba |
3rd Author's Name | Ryohei NUMATA |
3rd Author's Affiliation | University of Tsukuba |
4th Author's Name | Koki NAKAZAWA |
4th Author's Affiliation | University of Tsukuba |
5th Author's Name | Noritaka USAMI |
5th Author's Affiliation | Nagoya University |
6th Author's Name | Takashi SUEMASU |
6th Author's Affiliation | University of Tsukuba |
Date | 2014-04-10 |
Paper # | SDM2014-7,OME2014-7 |
Volume (vol) | vol.114 |
Number (no) | 2 |
Page | pp.pp.- |
#Pages | 2 |
Date of Issue |