Presentation 2014-04-10
Effect of substrates on Al-induced crystallized Ge layers on insulating films and its application to flexible substrates
Naoki OYA, Kaoru TOKO, Ryohei NUMATA, Koki NAKAZAWA, Noritaka USAMI, Takashi SUEMASU,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) For fabricating next-generation flexible devices simultaneously allowing for high performance and low cost, we developed an Al-induced crystallized Ge layer on a plastic substrate, polyimide. By preparing an insulating film on the plastic substrate, we achieved a satisfactory layer exchange. Moreover, we revealed that the crystal quality of the resulting Ge layer strongly depended on the thickness of substrates. Finally, by employing a thick (125 μm) plastic substrate, we succeeded in forming the (111)-oriented Ge layer of large grains, which had equal crystallinity to AIC-Ge formed on a glass substrate.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Germanium / Thin film / Metal-induced crystallization / Flexible device
Paper # SDM2014-7,OME2014-7
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Committee OME
Conference Date 2014/4/3(1days)
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Registration To Organic Material Electronics (OME)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Effect of substrates on Al-induced crystallized Ge layers on insulating films and its application to flexible substrates
Sub Title (in English)
Keyword(1) Germanium
Keyword(2) Thin film
Keyword(3) Metal-induced crystallization
Keyword(4) Flexible device
1st Author's Name Naoki OYA
1st Author's Affiliation University of Tsukuba()
2nd Author's Name Kaoru TOKO
2nd Author's Affiliation University of Tsukuba
3rd Author's Name Ryohei NUMATA
3rd Author's Affiliation University of Tsukuba
4th Author's Name Koki NAKAZAWA
4th Author's Affiliation University of Tsukuba
5th Author's Name Noritaka USAMI
5th Author's Affiliation Nagoya University
6th Author's Name Takashi SUEMASU
6th Author's Affiliation University of Tsukuba
Date 2014-04-10
Paper # SDM2014-7,OME2014-7
Volume (vol) vol.114
Number (no) 2
Page pp.pp.-
#Pages 2
Date of Issue