| Presentation | 2014-04-10 Al-induced low-temperature crystallization for large-grained Ge(111) thin films on amorphous insulators Kaoru TOKO, Takashi SUEMASU, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We introduce Al-induced crystallization (AIC), a unique technique controlling the crystal orientation of polycrystalline Ge thin films on amorphous insulating substrates. The crystal quality of the Al-induced crystallized Ge layer is very sensitive to the growth parameters (e.g. thickness). By optimizing these parameters, we fabricated a 99% (111)-oriented Ge layer (50 nm) with large grains (～100 μm) on a SiO_2 substrate. Moreover, we promoted the reaction between Al and Ge based on the growth mechanism, and then achieved a (111)-oriented Ge layer at as low as 180 ℃. This achievement holds promise for fabricating Ge-based flexible devices on inexpensive plastic substrates. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Germanium / Thin film / Metal-induced crystallization / Crystal orientation control |
| Paper # | SDM2014-6,OME2014-6 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2014/4/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Al-induced low-temperature crystallization for large-grained Ge(111) thin films on amorphous insulators |
| Sub Title (in English) | |
| Keyword(1) | Germanium |
| Keyword(2) | Thin film |
| Keyword(3) | Metal-induced crystallization |
| Keyword(4) | Crystal orientation control |
| 1st Author's Name | Kaoru TOKO |
| 1st Author's Affiliation | University of Tsukuba() |
| 2nd Author's Name | Takashi SUEMASU |
| 2nd Author's Affiliation | University of Tsukuba |
| Date | 2014-04-10 |
| Paper # | SDM2014-6,OME2014-6 |
| Volume (vol) | vol.114 |
| Number (no) | 2 |
| Page | pp.pp.- |
| #Pages | 3 |
| Date of Issue | |