| Presentation | 2014-04-10 Influence of electron irradiation on Au-induced crystallization for amorphous Ge/SiO_2-substrate Kenta MOTO, Shin SAKIYAMA, Takatsugu SAKAI, Kazutoshi NAKASHIMA, Hayato OKAMOTO, Kenichiro TAKAKURA, Isao TSUNODA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Au-induced crystallization for amorphous Ge (a-Ge) thin film on insulator is investigated as low-temperature crystallization method. However, low-temperature crystallization is required long annealing time (～a few hours) in this method. To reduce the annealing time for crystallization, we have examined the electron irradiation effect of Au-induced crystallization for a-Ge/SiO_2. As a result, the annealing time for crystallization is reduced to 1/2 by electron irradiation. In addition, the lateral crystallization region has high crystalline quality. These results suggest that Au-induced crystallization for a-Ge/SiO_2 is enhanced by electron irradiation. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Metal induced crystallization / Low temperature formation / Germanium / Electron irradiation |
| Paper # | SDM2014-5,OME2014-5 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2014/4/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Influence of electron irradiation on Au-induced crystallization for amorphous Ge/SiO_2-substrate |
| Sub Title (in English) | |
| Keyword(1) | Metal induced crystallization |
| Keyword(2) | Low temperature formation |
| Keyword(3) | Germanium |
| Keyword(4) | Electron irradiation |
| 1st Author's Name | Kenta MOTO |
| 1st Author's Affiliation | Kumamoto National College of Technology() |
| 2nd Author's Name | Shin SAKIYAMA |
| 2nd Author's Affiliation | Kumamoto National College of Technology |
| 3rd Author's Name | Takatsugu SAKAI |
| 3rd Author's Affiliation | Kumamoto National College of Technology |
| 4th Author's Name | Kazutoshi NAKASHIMA |
| 4th Author's Affiliation | Kumamoto National College of Technology |
| 5th Author's Name | Hayato OKAMOTO |
| 5th Author's Affiliation | Kumamoto National College of Technology |
| 6th Author's Name | Kenichiro TAKAKURA |
| 6th Author's Affiliation | Kumamoto National College of Technology |
| 7th Author's Name | Isao TSUNODA |
| 7th Author's Affiliation | Kumamoto National College of Technology |
| Date | 2014-04-10 |
| Paper # | SDM2014-5,OME2014-5 |
| Volume (vol) | vol.114 |
| Number (no) | 2 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |