Presentation | 2014-04-10 Single-crystalline Silicon Layer Transfer Technique Utilizing Meniscus Force and Its Application to Device Fabrication Seiichiro Higashi, Kohei Sakaike, Muneki Akazawa, Shogo Nakamura, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | An SOI layer with midair cavity formed by wet etching of BOX layer has been transferred to a counter substrate by meniscus force generated by pure water. Thin-film transistors (TFTs) fabricated on glass (Corning Eagle200) and plastic (PET) substrates based on the proposed layer transfer technique show very high field effect mobilities of 1226 and 609 cm^2V^<-1>s^<-1>, respectively, and these results show the proposed method is quite promising as a low temperature device fabrication technique. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Meniscus force / Layer transfer / Flexible / Thin film transistor |
Paper # | SDM2014-3,OME2014-3 |
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Committee | OME |
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Conference Date | 2014/4/3(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Organic Material Electronics (OME) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Single-crystalline Silicon Layer Transfer Technique Utilizing Meniscus Force and Its Application to Device Fabrication |
Sub Title (in English) | |
Keyword(1) | Meniscus force |
Keyword(2) | Layer transfer |
Keyword(3) | Flexible |
Keyword(4) | Thin film transistor |
1st Author's Name | Seiichiro Higashi |
1st Author's Affiliation | Graduate School of Advanced Sciences of Matter, Hiroshima University() |
2nd Author's Name | Kohei Sakaike |
2nd Author's Affiliation | Graduate School of Advanced Sciences of Matter, Hiroshima University |
3rd Author's Name | Muneki Akazawa |
3rd Author's Affiliation | Graduate School of Advanced Sciences of Matter, Hiroshima University |
4th Author's Name | Shogo Nakamura |
4th Author's Affiliation | Graduate School of Advanced Sciences of Matter, Hiroshima University |
Date | 2014-04-10 |
Paper # | SDM2014-3,OME2014-3 |
Volume (vol) | vol.114 |
Number (no) | 2 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |