| Presentation | 2014-04-10 Single-crystalline Silicon Layer Transfer Technique Utilizing Meniscus Force and Its Application to Device Fabrication Seiichiro Higashi, Kohei Sakaike, Muneki Akazawa, Shogo Nakamura, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | An SOI layer with midair cavity formed by wet etching of BOX layer has been transferred to a counter substrate by meniscus force generated by pure water. Thin-film transistors (TFTs) fabricated on glass (Corning Eagle200) and plastic (PET) substrates based on the proposed layer transfer technique show very high field effect mobilities of 1226 and 609 cm^2V^<-1>s^<-1>, respectively, and these results show the proposed method is quite promising as a low temperature device fabrication technique. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Meniscus force / Layer transfer / Flexible / Thin film transistor |
| Paper # | SDM2014-3,OME2014-3 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2014/4/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Single-crystalline Silicon Layer Transfer Technique Utilizing Meniscus Force and Its Application to Device Fabrication |
| Sub Title (in English) | |
| Keyword(1) | Meniscus force |
| Keyword(2) | Layer transfer |
| Keyword(3) | Flexible |
| Keyword(4) | Thin film transistor |
| 1st Author's Name | Seiichiro Higashi |
| 1st Author's Affiliation | Graduate School of Advanced Sciences of Matter, Hiroshima University() |
| 2nd Author's Name | Kohei Sakaike |
| 2nd Author's Affiliation | Graduate School of Advanced Sciences of Matter, Hiroshima University |
| 3rd Author's Name | Muneki Akazawa |
| 3rd Author's Affiliation | Graduate School of Advanced Sciences of Matter, Hiroshima University |
| 4th Author's Name | Shogo Nakamura |
| 4th Author's Affiliation | Graduate School of Advanced Sciences of Matter, Hiroshima University |
| Date | 2014-04-10 |
| Paper # | SDM2014-3,OME2014-3 |
| Volume (vol) | vol.114 |
| Number (no) | 2 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |