| Presentation | 2014-02-28 Novel Implantation Process of Carbon Nanotubes for Plugs and Vias, and their Integration with Transferred Multilayer Graphene Wire Obtained by Annealing Sputtered Amorphous Carbon Motonobu Sato, Makoto Takahashi, Mizuhisa Nihei, Shintaro Sato, Naoki Yokoyama, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have developed a novel process, the implantation of carbon nanotubes (CNTs) into holes like plugs, vias, and through-silicon vias (TSVs) for the first time. The developed room-temperature process is suitable for back-end-of-line (BEOL) processes of LSI. With this approach, we can use high-quality CNTs grown at high temperature on a different substrate and densify the CNTs. Consequently, the implanted CNT plugs with metal wires had a resistance one order of magnitude lower than the directly grown CNT plugs. In addition, by using TiN/Ti as contact metal layers, we successfully integrated the implanted CNT plug with transferred multilayer graphene (MLG) wires obtained by annealing sputtered amorphous carbon for all carbon interconnects. The implantation method is expected to be able to fabricate the low-resistance CNT plugs by using high-quality CNTs and improving the connection to the wires. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Carbon nanotube / Implantation / Plug / Multilayer graphene / Transfer / Interconnects |
| Paper # | SDM2013-170 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2014/2/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Novel Implantation Process of Carbon Nanotubes for Plugs and Vias, and their Integration with Transferred Multilayer Graphene Wire Obtained by Annealing Sputtered Amorphous Carbon |
| Sub Title (in English) | |
| Keyword(1) | Carbon nanotube |
| Keyword(2) | Implantation |
| Keyword(3) | Plug |
| Keyword(4) | Multilayer graphene |
| Keyword(5) | Transfer |
| Keyword(6) | Interconnects |
| 1st Author's Name | Motonobu Sato |
| 1st Author's Affiliation | Collaborative Research Team Green Nanoelectronics Center(GNC):National Institute of Advanced Industrial Science and Technology(AIST)() |
| 2nd Author's Name | Makoto Takahashi |
| 2nd Author's Affiliation | Collaborative Research Team Green Nanoelectronics Center(GNC):National Institute of Advanced Industrial Science and Technology(AIST) |
| 3rd Author's Name | Mizuhisa Nihei |
| 3rd Author's Affiliation | Collaborative Research Team Green Nanoelectronics Center(GNC):National Institute of Advanced Industrial Science and Technology(AIST) |
| 4th Author's Name | Shintaro Sato |
| 4th Author's Affiliation | Collaborative Research Team Green Nanoelectronics Center(GNC):National Institute of Advanced Industrial Science and Technology(AIST) |
| 5th Author's Name | Naoki Yokoyama |
| 5th Author's Affiliation | Collaborative Research Team Green Nanoelectronics Center(GNC):National Institute of Advanced Industrial Science and Technology(AIST) |
| Date | 2014-02-28 |
| Paper # | SDM2013-170 |
| Volume (vol) | vol.113 |
| Number (no) | 451 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |