| Presentation | 2014-02-10 Note on Weighted Fault Coverage Considering Multiple Defect Sizes and Via Open Yuta Nakayama, Masayuki Arai, Hongbo Shi, Kazuhiko Iwasaki, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Shrinking feature size and higher integration on semiconductor device manufacturing technology bring a problem of the gap between the defect level estimated at the design stage from the reported one for fabricated devices. In this study, as one possible strategy to accurately estimate the defect level, we discuss on a weighted fault coverage estimation considering multiple different defect sizes and via open. For each wire in a given layout data, we execute critical area analysis multiple times, assuming different defect sizes. We evaluate the accuracy of critical area for the assumed sizes of the defects and the number of defects sizes applied. Taking open faults due to via open defects into account, we further calculate weighted fault coverages considering frequency of occurrence of each fault. We also discuss on the accuracy of fault coverage and defect level derived under different defect size combinations. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | weighted fault coverage / layout-aware / critical area / via open defect / defect size / defect level |
| Paper # | DC2013-84 |
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| Conference Information | |
| Committee | DC |
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| Conference Date | 2014/2/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Dependable Computing (DC) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Note on Weighted Fault Coverage Considering Multiple Defect Sizes and Via Open |
| Sub Title (in English) | |
| Keyword(1) | weighted fault coverage |
| Keyword(2) | layout-aware |
| Keyword(3) | critical area |
| Keyword(4) | via open defect |
| Keyword(5) | defect size |
| Keyword(6) | defect level |
| 1st Author's Name | Yuta Nakayama |
| 1st Author's Affiliation | Graduate School of System Design, Tokyo Metropolitan University() |
| 2nd Author's Name | Masayuki Arai |
| 2nd Author's Affiliation | College of Industrial Technology, Nihon University:Graduate School of System Design, Tokyo Metropolitan University |
| 3rd Author's Name | Hongbo Shi |
| 3rd Author's Affiliation | Library and Academic Information Center, Tokyo Metropolitan University |
| 4th Author's Name | Kazuhiko Iwasaki |
| 4th Author's Affiliation | Library and Academic Information Center, Tokyo Metropolitan University |
| Date | 2014-02-10 |
| Paper # | DC2013-84 |
| Volume (vol) | vol.113 |
| Number (no) | 430 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |