| Presentation | 2014-01-24 Luminescence property of hexagonal boron nitride films grown by high-temperature CVD Naoki UMEHARA, Iori KUWAHARA, Hey-Young LEE, Tetsuya KOUNO, Hiroko KOMINAMI, Yoichiro NAKANISHI, Kazuhiko HARA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Hexagonal boron nitride (h-BN) thin films have been grown on a c-plane sapphire substrate by atmospheric-pressure chemical vapor deposition using BCl3 and NH3 as precursors. The growth temperature (T_g) was varied from 1300 to 1700℃. Prior to growth, the substrate surface was nitrided in a NH_3 flow at T_g. The XRD measurement has indicated that the crystallization is promoted with increasing Tg from 1300℃, resulting in the growth of the film strongly oriented towards c-axis at 1500℃. However, the further increase of T_g deteriorated the crystalline quality, which suggests the excessive nitridation of the substrate surface. The cathodoluminescence property has a correlation with the crystalline quality. The pronounced emission band characteristic of h-BN was also observed from the film grown at 1500℃. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | hexagonal boron nitride / CVD / thin film / cathodoluminescence |
| Paper # | EID2013-14 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 2014/1/17(1days) |
| Place (in Japanese) | (See Japanese page) |
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| Topics (in Japanese) | (See Japanese page) |
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| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Luminescence property of hexagonal boron nitride films grown by high-temperature CVD |
| Sub Title (in English) | |
| Keyword(1) | hexagonal boron nitride |
| Keyword(2) | CVD |
| Keyword(3) | thin film |
| Keyword(4) | cathodoluminescence |
| 1st Author's Name | Naoki UMEHARA |
| 1st Author's Affiliation | Graduate School of Engineering, Shizuoka University() |
| 2nd Author's Name | Iori KUWAHARA |
| 2nd Author's Affiliation | Faculty of Engineering, Shizuoka University |
| 3rd Author's Name | Hey-Young LEE |
| 3rd Author's Affiliation | Graduate School of Engineering, Shizuoka University |
| 4th Author's Name | Tetsuya KOUNO |
| 4th Author's Affiliation | Graduate School of Engineering, Shizuoka University |
| 5th Author's Name | Hiroko KOMINAMI |
| 5th Author's Affiliation | Graduate School of Engineering, Shizuoka University |
| 6th Author's Name | Yoichiro NAKANISHI |
| 6th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 7th Author's Name | Kazuhiko HARA |
| 7th Author's Affiliation | Research Institute of Electronics, Shizuoka University:Graduate School of Science and Technology, Shizuoka University |
| Date | 2014-01-24 |
| Paper # | EID2013-14 |
| Volume (vol) | vol.113 |
| Number (no) | 408 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |