| Presentation | 2013-10-25 Low temperature growth and structural characterization for SiC films by HWCVD using filaments coated with SiC Katsuya ABE, Hayato Ozawa, Tomohiko Yamakami, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | SiC films were prepared at low substrate temperature with changing substrate-filament distance and growth pressure by hot-wire CVD method using graphite catalysts coated with SiC. The crystallinity of film was improved with decreasing substrate-filament distance. Thus, it was confirmed from XRD patterns that pc-SiC films were successfully obtained at low substrate temperature of 400°C. The growth mechanisms in gas phase and on growth surface were. considered from the experimental results and it was suggested that the optimization of both the substrate-filament distance and growth pressure was required to improve crystallinity of SiC film. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | HW-CVD / SiC / Low temperature growth |
| Paper # | CPM2013-105 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2013/10/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Low temperature growth and structural characterization for SiC films by HWCVD using filaments coated with SiC |
| Sub Title (in English) | |
| Keyword(1) | HW-CVD |
| Keyword(2) | SiC |
| Keyword(3) | Low temperature growth |
| 1st Author's Name | Katsuya ABE |
| 1st Author's Affiliation | Faculty of Engineering, Shinshu University() |
| 2nd Author's Name | Hayato Ozawa |
| 2nd Author's Affiliation | Faculty of Engineering, Shinshu University |
| 3rd Author's Name | Tomohiko Yamakami |
| 3rd Author's Affiliation | Faculty of Engineering, Shinshu University |
| Date | 2013-10-25 |
| Paper # | CPM2013-105 |
| Volume (vol) | vol.113 |
| Number (no) | 268 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |