Presentation 2013-10-25
FeおよびFeSi積層膜からの固相反応法によるSi上鉄シリサイド薄膜形成(簿膜プロセス・材料,一般)
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Paper # CPM2013-103
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Committee CPM
Conference Date 2013/10/17(1days)
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Language JPN
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Date 2013-10-25
Paper # CPM2013-103
Volume (vol) vol.113
Number (no) 268
Page pp.pp.-
#Pages 4
Date of Issue