| Presentation | 2013-10-25 Fabrication of titanium oxide using plasma excited atomic layer deposition Kensaku Kanomata, Hisashi ohba, Katsuaki Momiyama, Takahiko Suzuki, Bashil Ahmmad, Shigeru Kubota, Kazuhiro Hirahara, Fumihiko Hirose, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Room-temperature atomic layer deposition (ALD) of titanium dioxide is developed using tetrakis(dimethylamino)titanium (TDMAT) and plasma-excited water vapor generated from a remote plasma source. The plasma-excited water vapor is effective in oxidizing the TDMAT-adsorbed TiO_2 surface while leaving OH sites on the growing surface at room temperature for further TDMAT adsorption. The growth rate is measured to be 0.157nm/cycle at room temperature. The TDMAT adsorption and its oxidation on TiO_2 were investigated by multiple-internal-refraction infrared absorption spectroscopy (MIR-IRAS). We report adsorption and desorption data in order to design TiO_2-ALD at room temperature. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ALD / TDMAT / Plasma-excited H_2O / MIR-IRAS |
| Paper # | CPM2013-102 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2013/10/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of titanium oxide using plasma excited atomic layer deposition |
| Sub Title (in English) | |
| Keyword(1) | ALD |
| Keyword(2) | TDMAT |
| Keyword(3) | Plasma-excited H_2O |
| Keyword(4) | MIR-IRAS |
| 1st Author's Name | Kensaku Kanomata |
| 1st Author's Affiliation | Graduate School of Science and Engineering,Yamagata University() |
| 2nd Author's Name | Hisashi ohba |
| 2nd Author's Affiliation | Graduate School of Science and Engineering,Yamagata University |
| 3rd Author's Name | Katsuaki Momiyama |
| 3rd Author's Affiliation | Graduate School of Science and Engineering,Yamagata University |
| 4th Author's Name | Takahiko Suzuki |
| 4th Author's Affiliation | Graduate School of Science and Engineering,Yamagata University |
| 5th Author's Name | Bashil Ahmmad |
| 5th Author's Affiliation | Graduate School of Science and Engineering,Yamagata University |
| 6th Author's Name | Shigeru Kubota |
| 6th Author's Affiliation | Graduate School of Science and Engineering,Yamagata University |
| 7th Author's Name | Kazuhiro Hirahara |
| 7th Author's Affiliation | Yamagata University |
| 8th Author's Name | Fumihiko Hirose |
| 8th Author's Affiliation | Graduate School of Science and Engineering,Yamagata University |
| Date | 2013-10-25 |
| Paper # | CPM2013-102 |
| Volume (vol) | vol.113 |
| Number (no) | 268 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |