| Presentation | 2013-10-24 Oxidation characteristic of Al-Nb alloy films as a capping layer on Cu Atsushi NOYA, Mayumi B TAKEYAMA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Oxidation characteristic of the Al-Nb alloy film deposited on Cu is examined by Auger electron spectroscopy and X-ray photoelectron spectroscopy. The preferential oxidation of Al occurs at the alloy surface, resulting in the formation of thin A1_2O_3 layer that protects Nb and Cu from oxidation. After the oxidation reaction at 500°C for 1 h, Cu atoms forced into the Cu layer underneath, and no Nb diffusion into Cu occurs. This oxidation behavior makes the successful separation of the Cu layer from oxidation. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Al-Nb alloy film / Surface passivation / Preferential oxidation / Capping layer |
| Paper # | CPM2013-101 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2013/10/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Oxidation characteristic of Al-Nb alloy films as a capping layer on Cu |
| Sub Title (in English) | |
| Keyword(1) | Al-Nb alloy film |
| Keyword(2) | Surface passivation |
| Keyword(3) | Preferential oxidation |
| Keyword(4) | Capping layer |
| 1st Author's Name | Atsushi NOYA |
| 1st Author's Affiliation | Faculty of Engineering,Kitami Institute of Technology() |
| 2nd Author's Name | Mayumi B TAKEYAMA |
| 2nd Author's Affiliation | Faculty of Engineering,Kitami Institute of Technology |
| Date | 2013-10-24 |
| Paper # | CPM2013-101 |
| Volume (vol) | vol.113 |
| Number (no) | 268 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |