Presentation 2013-08-29
Mid-infrared sensors with type-II InAs/GaSb superlattice absorption layers grown on InP substrates
Kohei MIURA, Yasuhiro IGUCHI, Yuuichi KAWAMURA,
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Abstract(in English) Type-II InAs/GaSb superlattices (SLs), which are attractive for absorption layers of mid-infrared sensors, are usually grown on GaSb substrates. Since GaSb substrates absorb infrared light, other substrates with high transparency are favorable for back-illuminated sensors. We have focused on InP substrate with high transparency and relatively small lattice mismatch. The crystallographic and optical quality of SLs improved as GaSb buffer layer thickness increased due to the reduction of threading dislocations. Infrared sensors with InAs/GaSb SL absorption layers grown on InP substrates were fabricated for the first time. Mid-infrared sensors using InAs/GaSb SLs on InP substrates are promising.
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Keyword(in English) GaSb / InAs / type-II superlattice / InP / mid-infrared sensor / dark current
Paper # R2013-32,EMD2013-38,CPM2013-57,OPE2013-61,LQE2013-31
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Committee EMD
Conference Date 2013/8/22(1days)
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Registration To Electromechanical Devices (EMD)
Language JPN
Title (in Japanese) (See Japanese page)
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Title (in English) Mid-infrared sensors with type-II InAs/GaSb superlattice absorption layers grown on InP substrates
Sub Title (in English)
Keyword(1) GaSb
Keyword(2) InAs
Keyword(3) type-II superlattice
Keyword(4) InP
Keyword(5) mid-infrared sensor
Keyword(6) dark current
1st Author's Name Kohei MIURA
1st Author's Affiliation Transmission Device R&D Laboratories, Sumitomo Electric Industries, Ltd.()
2nd Author's Name Yasuhiro IGUCHI
2nd Author's Affiliation Transmission Device R&D Laboratories, Sumitomo Electric Industries, Ltd.
3rd Author's Name Yuuichi KAWAMURA
3rd Author's Affiliation School of Engineering, Osaka Prefecture University
Date 2013-08-29
Paper # R2013-32,EMD2013-38,CPM2013-57,OPE2013-61,LQE2013-31
Volume (vol) vol.113
Number (no) 187
Page pp.pp.-
#Pages 6
Date of Issue