Presentation 2013-08-01
3D-architecture technology movements and opportunity of Japan
Hiroaki IKEDA,
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Abstract(in English) This is the overview of the world wide TSV/3D integration technology developments and State of the Art in Japan. Latter half of the paper describes current issues to be resolved and expected breakthrough in Material/Equipment region for TSV/3D technologies.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) 3D integration / TSV / 3D
Paper # SDM2013-69,ICD2013-51
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Committee ICD
Conference Date 2013/7/25(1days)
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Registration To Integrated Circuits and Devices (ICD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) 3D-architecture technology movements and opportunity of Japan
Sub Title (in English)
Keyword(1) 3D integration
Keyword(2) TSV
Keyword(3) 3D
1st Author's Name Hiroaki IKEDA
1st Author's Affiliation Association of Super-Advanced Electronics Technologies (ASET)()
Date 2013-08-01
Paper # SDM2013-69,ICD2013-51
Volume (vol) vol.113
Number (no) 173
Page pp.pp.-
#Pages 6
Date of Issue