| Presentation | 2013-08-02 Preparation and Evaluation of ZnO-Based Transparent Conducting Thin Films Satoru NOGE, Kentaro KONISHI, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Gallium doped zinc oxide (GZO) thin films were prepared on glass substrates and Si substrates by RF magnetron sputtering method by changing following parameters, oxygen concentration, number of Gallium pellets on ZnO target and substrate temperature. The resistivity and transmittance of these films were investigated by four-probe method and measurement system using a spectrometer. As a result, the GZO thin film having minimum resistivity of 2.32×10^<-3> Ωcm and average transmittance of 92.5 % in visible light region was obtained following conditions, oxygen concentration; 0 %, number of Gallium pellets on ZnO target; 3 pellet, substrate temperature; 330℃. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ZnO / AZO / GZO / Sputtering / Oxide Semiconductor |
| Paper # | CPM2013-48 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2013/7/25(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Preparation and Evaluation of ZnO-Based Transparent Conducting Thin Films |
| Sub Title (in English) | |
| Keyword(1) | ZnO |
| Keyword(2) | AZO |
| Keyword(3) | GZO |
| Keyword(4) | Sputtering |
| Keyword(5) | Oxide Semiconductor |
| 1st Author's Name | Satoru NOGE |
| 1st Author's Affiliation | Electrical and Electronics Engineering, Numazu NCT() |
| 2nd Author's Name | Kentaro KONISHI |
| 2nd Author's Affiliation | Advanced course, Numazu NCT |
| Date | 2013-08-02 |
| Paper # | CPM2013-48 |
| Volume (vol) | vol.113 |
| Number (no) | 171 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |