| Presentation | 2013-08-02 Development of Substrate Heater System of Cold-Wall Chemical Vapor Deposition Equipment for Improvement of Single-Walled Nanotubes Quality Yusaku Tsuda, Takumi Sagara, Kenichi Yamakawa, Keisuke Yoshida, Nobuyuki Iwata, Hiroshi Yamamoto, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have developed an alcohol catalytic chemical vapor deposition (ACCVD) process in order to fabricate nanoscaled electronic devices using single-walled carbon nanotubes (SWNTs). A cold wall chemical vapor deposition (CVD) was adopted for preparation of SWNTs, and a structure of a substrate heater of the CVD apparatus was improved to obtain the optimum preparation conditions of high quality SWNTs. As a result the growth conditions of high quality SWNTs were studied. Furthermore a novel process was also developed to selectively control the chirality of SWNTs by in-situ irradiation of free electron laser (FEL) during the successful SWNTs growth. It was found that only semiconducting SWNTs were grown by 800 nm FEL irradiation, while various kinds of chirality appeared in SWNTs prepared by a conventional CVD process without FEL irradiation. From the obtained results a hopeful process was demonstrated for realization of new SWNTs electronic devices. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | single-walled carbon nanotubes / chemical vapor deposition / substrate heater / free electron laser / chirality control |
| Paper # | CPM2013-47 |
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| Committee | CPM |
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| Conference Date | 2013/7/25(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of Substrate Heater System of Cold-Wall Chemical Vapor Deposition Equipment for Improvement of Single-Walled Nanotubes Quality |
| Sub Title (in English) | |
| Keyword(1) | single-walled carbon nanotubes |
| Keyword(2) | chemical vapor deposition |
| Keyword(3) | substrate heater |
| Keyword(4) | free electron laser |
| Keyword(5) | chirality control |
| 1st Author's Name | Yusaku Tsuda |
| 1st Author's Affiliation | College of Science & Technology, Nihon Univ.() |
| 2nd Author's Name | Takumi Sagara |
| 2nd Author's Affiliation | College of Science & Technology, Nihon Univ. |
| 3rd Author's Name | Kenichi Yamakawa |
| 3rd Author's Affiliation | College of Science & Technology, Nihon Univ. |
| 4th Author's Name | Keisuke Yoshida |
| 4th Author's Affiliation | College of Science & Technology, Nihon Univ. |
| 5th Author's Name | Nobuyuki Iwata |
| 5th Author's Affiliation | College of Science & Technology, Nihon Univ. |
| 6th Author's Name | Hiroshi Yamamoto |
| 6th Author's Affiliation | College of Science & Technology, Nihon Univ. |
| Date | 2013-08-02 |
| Paper # | CPM2013-47 |
| Volume (vol) | vol.113 |
| Number (no) | 171 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |