| Presentation | 2013-06-21 ZnO film growth using high-energy H_2O generated by a catalytic reaction : Effect of low-temperature buffer layer K. TAKEZAWA, T. NAKAMURA, T. OYANAGI, T. KATO, H. KATAGIRI, K. OOISHI, K. JINBO, K. YASUI, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | ZnO thin films were grown on glass substrates through a reaction between dimethylzinc and high-energy H_2O. The latter was produced by a Pt-catalyzed H_2-O_2 reaction. Although the ZnO films grown on a-sapphire substrates showed excellent electrical properties, those grown on glass substrates showed poor electrical properties. For the application of transparent conductive thin films, the improvement of the optical and electrical properties of the ZnO films on the glass substrates was tried by the insertion of a low temperature buffer layer. Although crystal orientation along c-axis was not improved by the buffer layer, Hall mobility was improved. The improvement of the Hall mobility was correlated well with an empirical parameter E_0 estimated from the absorption coefficients at sub-bandgap energy. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ZnO / catalytic reaction / CVD / surface morphology / optical transmittance / Hall mobility |
| Paper # | EMD2013-23,CPM2013-38,OME2013-46 |
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| Conference Information | |
| Committee | EMD |
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| Conference Date | 2013/6/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | ZnO film growth using high-energy H_2O generated by a catalytic reaction : Effect of low-temperature buffer layer |
| Sub Title (in English) | |
| Keyword(1) | ZnO |
| Keyword(2) | catalytic reaction |
| Keyword(3) | CVD |
| Keyword(4) | surface morphology |
| Keyword(5) | optical transmittance |
| Keyword(6) | Hall mobility |
| 1st Author's Name | K. TAKEZAWA |
| 1st Author's Affiliation | Nagaoka University of Technology() |
| 2nd Author's Name | T. NAKAMURA |
| 2nd Author's Affiliation | Nagaoka University of Technology |
| 3rd Author's Name | T. OYANAGI |
| 3rd Author's Affiliation | Nagaoka University of Technology |
| 4th Author's Name | T. KATO |
| 4th Author's Affiliation | Nagaoka University of Technology |
| 5th Author's Name | H. KATAGIRI |
| 5th Author's Affiliation | Nagaoka National College of Technology |
| 6th Author's Name | K. OOISHI |
| 6th Author's Affiliation | Nagaoka National College of Technology |
| 7th Author's Name | K. JINBO |
| 7th Author's Affiliation | Nagaoka National College of Technology |
| 8th Author's Name | K. YASUI |
| 8th Author's Affiliation | Nagaoka University of Technology |
| Date | 2013-06-21 |
| Paper # | EMD2013-23,CPM2013-38,OME2013-46 |
| Volume (vol) | vol.113 |
| Number (no) | 96 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |