| Presentation | 2013-06-21 Crystal growth of the Cr_2O_3 thin films on LiNbO_3 substrates Takumi Nakamura, Takuji Kuroda, Nobuyuki Iwata, Hiroshi Yamamoto, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The annealing optimal condition is searched of the c- and r-cut LiNbO_3(LNO) substrates. Heat treatment of c-cut is carried out in air for 5～12 hour at 700～950℃. Heat treatment of r-cut is carried out in air for 3～24 hour at 700～1050℃. In c-cut LNO substrates, the wavy step-terrace structure is observed at 1000℃ or more for 5 hour. At 800℃ or more for 12 hour. A 6.2nm high particulates appeared on the surface of the substrate. A number of particulates decrease at high temperature. In r-cut LNO substrates, It will the step become a form like a needle, if heat treatment time is 5 hour and fewer or temperature is 1000℃ over. At 700℃ and 800℃, a facet-like step and bunching step, and smooth step bunching step appear. At 900℃, the step like stairs and bunching step are observed. The Cr_2O_3 thin films are deposited by DC-RF magnetron sputtering method on r-cut LNO substrates. Uniaxial grains with the size of approximately 0.4μm in wide and longer than 0.4μm in length are observed. The 58nm deep slot occurred between grains. It was flat when measuring only the one grain surface. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Cr_2O_3 / LiNbO_3 / anneal / films / growth |
| Paper # | EMD2013-20,CPM2013-35,OME2013-43 |
| Date of Issue |
| Conference Information | |
| Committee | EMD |
|---|---|
| Conference Date | 2013/6/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Crystal growth of the Cr_2O_3 thin films on LiNbO_3 substrates |
| Sub Title (in English) | |
| Keyword(1) | Cr_2O_3 |
| Keyword(2) | LiNbO_3 |
| Keyword(3) | anneal |
| Keyword(4) | films |
| Keyword(5) | growth |
| 1st Author's Name | Takumi Nakamura |
| 1st Author's Affiliation | College of Science & Technology, Nihon Univ() |
| 2nd Author's Name | Takuji Kuroda |
| 2nd Author's Affiliation | College of Science & Technology, Nihon Univ |
| 3rd Author's Name | Nobuyuki Iwata |
| 3rd Author's Affiliation | College of Science & Technology, Nihon Univ |
| 4th Author's Name | Hiroshi Yamamoto |
| 4th Author's Affiliation | College of Science & Technology, Nihon Univ |
| Date | 2013-06-21 |
| Paper # | EMD2013-20,CPM2013-35,OME2013-43 |
| Volume (vol) | vol.113 |
| Number (no) | 96 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |