Presentation | 2013-06-21 MOVPE growth realized on heterogeneous substrate employing directly-bonded InP template Keiichi MATSUMOTO, Xinxin ZHANG, Yoshinori KANAYA, Kazuhiko SHIMOMURA, |
---|---|
PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Integrating III-V materials which enables high-speed computer with large-capacity on Si has been required. Therefore, we have fabricated InP/Si substrate employing wafer direct bonding and wet-etching. Then growth of GaInAs/InP MQW structure has been realized on the substrate using MOVPE. The same work has also been demonstrated on SiO_2-Si and Glass substrate. Furthermore, selective MOVPE growth of GaInAs/InP MQW structure has been done on the InP/Si substrate. Our work is of importance in terms of integration of several functional optical devices on heterogeneous substrate. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Optical interconnect / Wafer Direct Bonding / InP template / MOVPE |
Paper # | OPE2013-9,LQE2013-19 |
Date of Issue |
Conference Information | |
Committee | LQE |
---|---|
Conference Date | 2013/6/14(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
Vice Chair | |
Secretary | |
Assistant |
Paper Information | |
Registration To | Lasers and Quantum Electronics (LQE) |
---|---|
Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | MOVPE growth realized on heterogeneous substrate employing directly-bonded InP template |
Sub Title (in English) | |
Keyword(1) | Optical interconnect |
Keyword(2) | Wafer Direct Bonding |
Keyword(3) | InP template |
Keyword(4) | MOVPE |
1st Author's Name | Keiichi MATSUMOTO |
1st Author's Affiliation | Dept. of Electrical and Electronics Engineering, Faculty of Science and Technology, Sophia University() |
2nd Author's Name | Xinxin ZHANG |
2nd Author's Affiliation | Dept. of Electrical and Electronics Engineering, Faculty of Science and Technology, Sophia University |
3rd Author's Name | Yoshinori KANAYA |
3rd Author's Affiliation | Dept. of Electrical and Electronics Engineering, Faculty of Science and Technology, Sophia University |
4th Author's Name | Kazuhiko SHIMOMURA |
4th Author's Affiliation | Dept. of Electrical and Electronics Engineering, Faculty of Science and Technology, Sophia University |
Date | 2013-06-21 |
Paper # | OPE2013-9,LQE2013-19 |
Volume (vol) | vol.113 |
Number (no) | 100 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |