| Presentation | 2013-06-21 Basic Study on Fabrication Process Conditions of Micro-Spring Arrays for LSI interconnection Chinami KANESHIRO, Kyota KISHIMOTO, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In this paper, we present that the micro-spring probe arrays were succeeded to fabricate by controlling the elastic properties of metal film layers. The sputtering gas pressure was changed to realize various elastic properties of the metal layers. The experimental results showed that the micro-spring probe arrays were fabricated by controlling of layer number and thickness of metal layer. It is indicated that the elastic property of metal film depends on both of sputtering gas pressure and film thickness. Moreover, the requirement to bent metal wires due to film stress is to obtain large difference of elastic property between the upper layer and the bottom layer. The experimental results indicate that it may be possible to apply micro-spring arrays to LSI interconnection technology. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | spring probe / interconnection / MEMS / elastic property / stress distribution |
| Paper # | EMD2013-18,CPM2013-33,OME2013-41 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2013/6/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Basic Study on Fabrication Process Conditions of Micro-Spring Arrays for LSI interconnection |
| Sub Title (in English) | |
| Keyword(1) | spring probe |
| Keyword(2) | interconnection |
| Keyword(3) | MEMS |
| Keyword(4) | elastic property |
| Keyword(5) | stress distribution |
| 1st Author's Name | Chinami KANESHIRO |
| 1st Author's Affiliation | Okinawa National College of Technology() |
| 2nd Author's Name | Kyota KISHIMOTO |
| 2nd Author's Affiliation | Okinawa National College of Technology |
| Date | 2013-06-21 |
| Paper # | EMD2013-18,CPM2013-33,OME2013-41 |
| Volume (vol) | vol.113 |
| Number (no) | 97 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |