| Presentation | 2013-07-18 Trial Fabrication of 180 GHz-Band PTFE-Filled Waveguide by SR Etching and Its Evaluation Mitsuyoshi KISHIHARA, Hideki KIDO, Akinobu YAMAGUCHI, Yuichi UTSUMI, Isao OHTA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This paper describes trial fabrication of a PTFE-filled waveguide for 180 GHz-band operation with the use of the SR (synchrotron radiation) direct etching process of PTFE, sputter deposition of metal, and electroplating. It has been reported that PTFE microstructures can be fabricated by the direct exposure to SR. In this paper, the fabrication procedure for the PTFE-filled waveguide is briefly reviewed and the trial fabrication of the straight and the mitered-bend sections for 180 GHz operation is attempted. A waveguide flange for the 180 GHz PTFE-filled waveguide is also fabricated in the same process. The measured frequency characteristics of the PTFE-filled waveguides are shown, and the propagation losses are evaluated using the measurement results of the PTFE-filled waveguides with different lengths. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | X-ray lithography / sputtering / waveguide components / dielectric loaded waveguides |
| Paper # | MW2013-64,OPE2013-33,EST2013-28,MWP2013-23 |
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| Conference Information | |
| Committee | EST |
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| Conference Date | 2013/7/11(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electronic Simulation Technology (EST) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Trial Fabrication of 180 GHz-Band PTFE-Filled Waveguide by SR Etching and Its Evaluation |
| Sub Title (in English) | |
| Keyword(1) | X-ray lithography |
| Keyword(2) | sputtering |
| Keyword(3) | waveguide components |
| Keyword(4) | dielectric loaded waveguides |
| 1st Author's Name | Mitsuyoshi KISHIHARA |
| 1st Author's Affiliation | Faculty of Computer Science & System Engineering, Okayama Prefectural University() |
| 2nd Author's Name | Hideki KIDO |
| 2nd Author's Affiliation | Laboratory of Advanced Science and Technology for Industry, University of Hyogo |
| 3rd Author's Name | Akinobu YAMAGUCHI |
| 3rd Author's Affiliation | Laboratory of Advanced Science and Technology for Industry, University of Hyogo |
| 4th Author's Name | Yuichi UTSUMI |
| 4th Author's Affiliation | Laboratory of Advanced Science and Technology for Industry, University of Hyogo |
| 5th Author's Name | Isao OHTA |
| 5th Author's Affiliation | University of Hyogo |
| Date | 2013-07-18 |
| Paper # | MW2013-64,OPE2013-33,EST2013-28,MWP2013-23 |
| Volume (vol) | vol.113 |
| Number (no) | 143 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |