| Presentation | 2013-07-18 Electrostatic Analysis of Effective Permittivity for Microstructure Takuichi HIRANO, Jiro HIROKAWA, Makoto ANDO, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The authors have proposed evaluation technique of effective material property for dummy metal fills, which is inevitable to use in CMOS process. The proposed methods were (1) method that analyze eigenmode of a unit-cell by assuming wave propagation problem, and (2) method that assume capacitor and inductor model for a unit-cell to extract effective material property. This report presents electrostatic analysis of effective permittivity for dummy metal fills used in CMOS chips in order to verify the proposed methods in the past and to propose quick evaluation method. The effective permittivity agreed very well with those calculated by proposed methods in the past. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Microstructure / Dummy metal fills / CMOS / Electrostatic analysis / Effective permittivity / Laplace equation / Extraction |
| Paper # | MW2013-50,OPE2013-19,EST2013-14,MWP2013-9 |
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| Conference Information | |
| Committee | OPE |
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| Conference Date | 2013/7/11(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Optoelectronics (OPE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Electrostatic Analysis of Effective Permittivity for Microstructure |
| Sub Title (in English) | |
| Keyword(1) | Microstructure |
| Keyword(2) | Dummy metal fills |
| Keyword(3) | CMOS |
| Keyword(4) | Electrostatic analysis |
| Keyword(5) | Effective permittivity |
| Keyword(6) | Laplace equation |
| Keyword(7) | Extraction |
| 1st Author's Name | Takuichi HIRANO |
| 1st Author's Affiliation | Graduate School of Science and Engineering, Tokyo Institute of Technology() |
| 2nd Author's Name | Jiro HIROKAWA |
| 2nd Author's Affiliation | Graduate School of Science and Engineering, Tokyo Institute of Technology |
| 3rd Author's Name | Makoto ANDO |
| 3rd Author's Affiliation | Graduate School of Science and Engineering, Tokyo Institute of Technology |
| Date | 2013-07-18 |
| Paper # | MW2013-50,OPE2013-19,EST2013-14,MWP2013-9 |
| Volume (vol) | vol.113 |
| Number (no) | 142 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |